Techniques for fabrication of large-size graded reflectivity mirrors

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 光学薄膜技术研究与发展中心

	Techniques for fabrication of large-size graded reflectivity mirrors
	Lv Guonuan ; Wei Chaoyang ; Li Dawei ; Huang Jianbing ; Yi Kui
刊名	opt. eng.
	2008
卷号	47 期号:12 页码:123401
关键词	optical coatings graded reflectivity mirror graded thickness layer mask
ISSN号	0091-3286
中文摘要	according to the parameter requirements of a graded reflectivity mirror with a gaussian profile, the layer structure and the mask pattern are designed using a graded-thickness middle layer. the mask and the automatic mask-switchover equipment are designed considering the actual requirement of the thin films and the specific deposit facility. the uniformity of the layer thickness is analyzed. the measurement results indicate that samples prepared with this technique are basically in accordance with the design parameter. the scattering effect between the material molecules and the mask, thickness errors, and the alignment error between the mask and the substrate are the main factors that influence the deposit result. (c) 2008 society of photo-optical instrumentation engineers. [doi: 10.1117/1.3027595]
学科主题	光学薄膜
语种	英语
WOS记录号	WOS:000263304100008
公开日期	2009-09-22
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/4666]
专题	上海光学精密机械研究所_光学薄膜技术研究与发展中心
推荐引用方式 GB/T 7714	Lv Guonuan,Wei Chaoyang,Li Dawei,et al. Techniques for fabrication of large-size graded reflectivity mirrors[J]. opt. eng.,2008,47(12):123401.
APA	Lv Guonuan,Wei Chaoyang,Li Dawei,Huang Jianbing,&Yi Kui.(2008).Techniques for fabrication of large-size graded reflectivity mirrors.opt. eng.,47(12),123401.
MLA	Lv Guonuan,et al."Techniques for fabrication of large-size graded reflectivity mirrors".opt. eng. 47.12(2008):123401.