QQ客服 官方微博 反馈留言

	Nanoscale defect detection by heterodyne interferometry
	Lin, Haoshan ; Li, Yuhe ; Wang, Dongsheng ; Tong, Xiaolei ; Liu, Mei
	2010-10-12 ; 2010-10-12
关键词	FIELD OPTICAL MICROSCOPY SCANNING PROBE MICROSCOPY ATOMIC-FORCE MICROSCOPE TIP CANTILEVER SURFACE LASER SCATTERING VIBRATION PHASE Optics
中文摘要	We construct an instrument that facilitates the measurement of nanoscalle defects. It is based on heterodyne interferometry with phase measurement that utilizes a polarizing beam splitter to form a measuring signal and an oscillating cantilever tip that acts as a scanning probe to get the measurement values of sample topography. The dependence of the tip displacement on the variation of tip-sample distance and the comb scanning of the sample topography are investigated by experiments. The results prove that the tip displacement increases and is enough to be discriminated in various positions where the sample is approached. The system has been successfully utilized to measure the defect characterization by measuring the pitch of the standard sample. The results also show that the heterodyne system has good repeatability, a large measurement range, and high accuracy, with a measurement stability of 0.5 nm. (C) 2009 Optical Society of America
语种	英语 ; 英语
出版者	OPTICAL SOC AMER ; WASHINGTON ; 2010 MASSACHUSETTS AVE NW, WASHINGTON, DC 20036 USA
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/80469]
专题	清华大学
推荐引用方式 GB/T 7714	Lin, Haoshan,Li, Yuhe,Wang, Dongsheng,et al. Nanoscale defect detection by heterodyne interferometry[J],2010, 2010.
APA	Lin, Haoshan,Li, Yuhe,Wang, Dongsheng,Tong, Xiaolei,&Liu, Mei.(2010).Nanoscale defect detection by heterodyne interferometry..
MLA	Lin, Haoshan,et al."Nanoscale defect detection by heterodyne interferometry".(2010).

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。