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	Electrorheological damper for the ultra-precision air bearing stage
	Yu Zhu ; Songtao Jia ; Yaying Chen ; Guang Li
	2010-10-12 ; 2010-10-12
关键词	Practical Theoretical or Mathematical/ control system synthesis electrorheology linear motors machine bearings on-off control shock absorbers variable structure systems/ electrorheological damper ultra-precision air bearing stage smart materials electrorheological fluids electric fields linear-motor Eyring constitutive model on-off control sliding mode control/ C1340K Nonlinear control systems C1310 Control system analysis and synthesis methods C1340B Multivariable control systems E2210 Mechanical components E2300 Mechanical machinery E1550 Control technology and theory E2180D Vibrations and shock waves (mechanical engineering)
中文摘要	This paper illustrates how the electrorheological damper substantially improves the performance of the ultra-precision air bearing stage. Smart materials such as electrorheological fluids have attracted many researchers' attention because of their resistance changeable performance in different electric fields. Meanwhile, the ultra-precision air bearing stage driven by the linear-motor is characterized by zero mechanical damping and poor anti-disturbance. To solve this problem and consider the characteristics of electrorheological fluids, an electrorheological damper is proposed in this paper. The electrorheological damper's characteristics in high electric fields are obtained based on the Eyring constitutive model, which smoothly transits from the pre-yield to post-yield region. To enhance the performance of the electrorheological damper, which takes effect only when the stage is going to decelerate or position, the on-off and sliding mode control methods design and optimize the controller. The results prove that by using the advanced sliding mode control method, the characteristics of the ultra-precision air bearing stage can be effectively improved through the introduction of the electrorheological damper.
语种	英语
出版者	Springer ; China
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/80337]
专题	清华大学
推荐引用方式 GB/T 7714	Yu Zhu,Songtao Jia,Yaying Chen,et al. Electrorheological damper for the ultra-precision air bearing stage[J],2010, 2010.
APA	Yu Zhu,Songtao Jia,Yaying Chen,&Guang Li.(2010).Electrorheological damper for the ultra-precision air bearing stage..
MLA	Yu Zhu,et al."Electrorheological damper for the ultra-precision air bearing stage".(2010).

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