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	Fe/Mo纳米多层膜的结构与纳米力学性能研究
	王海斗 ; 徐滨士 ; 刘家浚 ; 李国禄 ; Wang Hai-dou ; Xu Bin-shi ; Liu Jia-jun ; Li Guo-lu
	2010-07-15 ; 2010-07-15
会议名称	2006全国摩擦学学术会议论文集（三） ; 2006全国摩擦学学术会议 ; 中国黑龙江哈尔滨 ; CNKI ; 中国机械工程学会摩擦学分会
关键词	金属纳米多层膜 X射线衍射 力学性能 Metal nano multilayer films, X-Ray difl&action, Mechanical property TB43
其他题名	Microstructures and nano mechanic performance on the Fe/Mo nano multi-layer films
中文摘要	通过射频溅射的方法在单晶硅基底上制备了不同调制波长的Fe/Mo纳米多层膜。利用XRD分析了薄膜相结构,用纳米力学微探针测定了薄膜的纳米硬度及弹性模量。结果表明,随着调制波长的增加,子层平行于表面的密排面发生了变化; 纳米硬度在小调制波长下出现了超硬现象;弹性模量基本不随调制波长的变化而变化。; Several kinds of Fe/Mo nano multi-layer films with different modulation wavelength were prepared by radio frequency sputtering technique on the single crystal silicoa The phase structures of the nano multi-layer films were studied by XRD and the nano hardness and nano modulus of the films were measured by nano-mechanics microprobe. The results showed that with increase of modulation wavelength, the close-packed plane, which paralleled the surface, in the sublayer of the Fe/Mo nano multi-layer films, changed. The super-hardness phenomenon occurred when the nano hardness under thin modulation wavelength, at the same time, the nano modulus had no variety with change of modulation wavelength.
语种	中文 ; 中文
内容类型	会议论文
源URL	[http://hdl.handle.net/123456789/70892]
专题	清华大学
推荐引用方式 GB/T 7714	王海斗,徐滨士,刘家浚,等. Fe/Mo纳米多层膜的结构与纳米力学性能研究[C]. 见:2006全国摩擦学学术会议论文集（三）, 2006全国摩擦学学术会议, 中国黑龙江哈尔滨, CNKI, 中国机械工程学会摩擦学分会.

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