| AlN电热元件的研制 | |
| 赵玉珍 ; 张珺 ; 周和平 ; Zhao Yuzhen ; Zhang Jun ; Zhou Heping | |
| 2010-06-10 ; 2010-06-10 | |
| 关键词 | 电热元件 AlN Pt 丝网印刷 electrical heating element AlN Pt silk printing TM924 |
| 其他题名 | Design and Fabrication of AlN Electrical Heating Element |
| 中文摘要 | 设计并制备了AlN电热元件,电热元件由AlN陶瓷基片及其附着其上的通电线路Pt组成。利用丝网印刷的方法在AlN表面进行Pt浆料布线,线条数目为10。烧成温度选为1000℃和1300℃。用红外测温仪测量不同电压下的电热元件的工作温度。研究发现,1300℃烧成的电热元件可稳定工作于1000℃以上,符合设计要求。AlN/Pt的结合界面SEM形貌表明AlN与Pt膜是紧密的机械结合。AlN表面氧化生成的氧化膜利于Pt膜与AlN陶瓷的结合。; AlN electrical heating element is designed and fabricated.The electrical heating element consists of AlN ceramic substrate with dual electrical resistance trace patterns.Pt is chosen as the trace material.10 line trace patterns are printed on the ceramic substrates using silk printing.The electrical heating elements are sintered at1000 ℃,1300 ℃ and kept for 10min.The working temperatures of the electrical heating elements are measured by infrared radiation thermometer when power is supplied.AlN electrical heating element sintered at 1300 ℃ can generate about 1000 ℃ and work safely and steadily for 60 s and meet the demand.The interface microstructure of AlN/Pt is studied by SEM.Pt film and ceramic are closed mechanical adherence.AlN is oxidized and forms Al2O3 film when the electrical heating element is sintered at high temperature.Al2O3 film is help to the joint of ceramic and Pt. |
| 语种 | 中文 ; 中文 |
| 内容类型 | 期刊论文 |
| 源URL | [http://hdl.handle.net/123456789/61713]  |
| 专题 | 清华大学 |
| 推荐引用方式 GB/T 7714 | 赵玉珍,张珺,周和平,等. AlN电热元件的研制[J],2010, 2010. |
| APA | 赵玉珍,张珺,周和平,Zhao Yuzhen,Zhang Jun,&Zhou Heping.(2010).AlN电热元件的研制.. |
| MLA | 赵玉珍,et al."AlN电热元件的研制".(2010). |
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