Y2O3 stabilized ZrO2 thin films deposited by electron beam evaporation: Structural, morphological characterization and laser induced damage threshold

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 光学薄膜技术研究与发展中心

	Y2O3 stabilized ZrO2 thin films deposited by electron beam evaporation: Structural, morphological characterization and laser induced damage threshold
	Wu Shi Gang ; Zhang Hong Ying ; Tian Guang Lei ; Xia ZL(夏志林) ; Shao JD(邵建达) ; Fan ZX(范正修)
刊名	appl. surf. sci.
	2006
卷号	253 期号:3 页码:1561
关键词	structure morphology LIDT YSZ thin film
ISSN号	0169-4332
中文摘要	four kinds of y2o3 stabilized zro2 (ysz) thin films with different y2o3 content have been prepared on bk7 substrates by electron-beam evaporation method. structural properties and surface morphology of thin films were investigated by x-ray diffraction (xrd) spectra and scanning probe microscope. laser induced damage threshold (lidt) was determined. it was found that crystalline phase and microstructure of ysz thin films was dependent on y2o3 molar content. ysz thin films changed from monoclinic phase to high temperature phase (tetragonal and cubic) with the increase of y2o3 content. the lidt of stabilized thin film is more than that of unstabilized thin films. the reason is that zro2 material undergoes phase transition during the course of e-beam evaporation resulting in more numbers of defects compared to that of ysz thin films. these defects act as absorptive center and the original breakdown points. (c) 2006 elsevier b.v. all rights reserved.
学科主题	光学薄膜
收录类别	EI
语种	英语
WOS记录号	WOS:000242818000085
公开日期	2009-09-22
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/4280]
专题	上海光学精密机械研究所_光学薄膜技术研究与发展中心
推荐引用方式 GB/T 7714	Wu Shi Gang,Zhang Hong Ying,Tian Guang Lei,et al. Y2O3 stabilized ZrO2 thin films deposited by electron beam evaporation: Structural, morphological characterization and laser induced damage threshold[J]. appl. surf. sci.,2006,253(3):1561, 1565.
APA	Wu Shi Gang,Zhang Hong Ying,Tian Guang Lei,夏志林,邵建达,&范正修.(2006).Y2O3 stabilized ZrO2 thin films deposited by electron beam evaporation: Structural, morphological characterization and laser induced damage threshold.appl. surf. sci.,253(3),1561.
MLA	Wu Shi Gang,et al."Y2O3 stabilized ZrO2 thin films deposited by electron beam evaporation: Structural, morphological characterization and laser induced damage threshold".appl. surf. sci. 253.3(2006):1561.