Extended bidirectional reflectance distribution function for polarized light scattering from subsurface defects under a smooth surface

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 光学薄膜技术研究与发展中心

	Extended bidirectional reflectance distribution function for polarized light scattering from subsurface defects under a smooth surface
	Shen Jian ; Deng DG(邓德刚) ; Kong Weijin ; Liu SJ(刘世杰) ; Shen Zicai ; Wei Chaoyang ; He HB(贺洪波) ; Shao JD(邵建达) ; Fan ZX(范正修)
刊名	j. opt. soc. am. a-opt. image sci. vis.
	2006
卷号	23 期号:11 页码:2810
关键词	ANGLE-RESOLVED ELLIPSOMETRY OPTICAL-MATERIALS DAMAGE MICROROUGHNESS COATINGS INTERFACES INSPECTION ROUGHNESS TOOL
ISSN号	1084-7529
中文摘要	by introducing the scattering probability of a subsurface defect (ssd) and statistical distribution functions of ssd radius, refractive index, and position, we derive an extended bidirectional reflectance distribution function (brdf) from the jones scattering matrix. this function is applicable to the calculation for comparison with measurement of polarized light-scattering resulting from a ssd. a numerical calculation of the extended brdf for the case of p-polarized incident light was performed by means of the monte carlo method. our numerical results indicate that the extended brdf strongly depends on the light incidence angle, the light scattering angle, and the out-of-plane azimuth angle. we observe a 180 degrees symmetry with respect to the azimuth angle. we further investigate the influence of the ssd density, the substrate refractive index, and the statistical distributions of the ssd radius and refractive index on the extended brdf. for transparent substrates, we also find the dependence of the extended brdf on the ssd positions. (c) 2006 optical society of america.
学科主题	光学薄膜
收录类别	EI
语种	英语
WOS记录号	WOS:000241431900017
公开日期	2009-09-22
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/4138]
专题	上海光学精密机械研究所_光学薄膜技术研究与发展中心
推荐引用方式 GB/T 7714	Shen Jian,Deng DG,Kong Weijin,et al. Extended bidirectional reflectance distribution function for polarized light scattering from subsurface defects under a smooth surface[J]. j. opt. soc. am. a-opt. image sci. vis.,2006,23(11):2810, 2816.
APA	Shen Jian.,邓德刚.,Kong Weijin.,刘世杰.,Shen Zicai.,...&范正修.(2006).Extended bidirectional reflectance distribution function for polarized light scattering from subsurface defects under a smooth surface.j. opt. soc. am. a-opt. image sci. vis.,23(11),2810.
MLA	Shen Jian,et al."Extended bidirectional reflectance distribution function for polarized light scattering from subsurface defects under a smooth surface".j. opt. soc. am. a-opt. image sci. vis. 23.11(2006):2810.