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	一种新型微致动元件的制作及特性研究
	荆阳 ; 雒建斌 ; 张力 ; Jing Yang ; Luo Jianbin ; Zhang Li
	2010-06-08 ; 2010-06-08
关键词	PMN-PZT 压电多层膜 U形微致动器 DTA-TGA PMN-PZT piezoelectric multilayer element U-type micro-actuator DTA-TGA TH703
其他题名	Study on Fabrication and Properties for a Novel Micro-actuated Element
中文摘要	介绍了一种用于计算机磁头精确定位的新型压电元件。该元件采用高速流延工艺制备Pb(Mg1/3Nb2/3)O3-Pb(Zr0.52Ti0.48)O3多层膜,由丝网印刷工艺制作Ag/Pd内电极。为优化元件的制作工艺,对流延过程作了DTA/TGA分析。结果显示,采用110℃、350℃和1090℃的三步烧结工艺可显著提高元件的钙钛化程度,从而提高其压电性能,减少内部缺陷。对元件的XRD分析显示,110℃和350℃时压电薄膜中以钙钛矿相为主,且存在大量的焦绿石相,当烧结温度达到1090℃时,焦绿石相的含量已经很少。SEM分析表明,与最终烧结温度1070℃相比,当烧结温度达到1090℃时元件的显微结构更为致密,内部缺陷更少。封装测试在多普勒干涉仪上进行,结果表明,该致动器具有优异的位移/电压灵敏度、谐振频率等特点。; A novel U-type piezoelectric micro-actuator for positioning a magnetic head for high-density hard disk devices had been fabricated and analyzed.This micro-actuator was made by using a high-speed tape-casting technique to deposit Pb(Mg_(1/3)Nb_(2/3))O_3-Pb(Zr_(0.52)Ti_(0.48))O_3(PMN-PZT) multiplayer films and applying screen-printing processes to fabricate Ag/Pd electrodes.The formation mechanism of PMN-PZT ternary solid solution prepared by mixed oxides techniques had been characterized by differential thermal analysis(DTA) and thermal gravimetric analysis(TGA). The reasonable co-firing process was composed of three steps: including co-firing at 110℃,350℃and 1090℃,respectively.The piezoelectric elements were investigated by XRD.The XRD analysis shows that many pyrochlore phase is formed in PMNPZT films fired in PbO atmosphere at 110℃ and 350℃ in addition to a perovskite phase,while a little pyrochlore phase is observed at 1090℃.PMN-PZT elements fired at 1090℃ show denser microstructure and lesser internal defects than those fired at 1070℃.After that,an U-type micro-actuator attached to each side via piezoelectric elements was also practically measured by laser Doppler vibrometer in order to testify the driving mechanics of it.The highest displacement/voltage sensitivity and corresponding resonance frequency are achieved by the micro-actuator.; 国家自然科学基金资助项目(90206022)
语种	中文 ; 中文
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/49056]
专题	清华大学
推荐引用方式 GB/T 7714	荆阳,雒建斌,张力,等. 一种新型微致动元件的制作及特性研究[J],2010, 2010.
APA	荆阳,雒建斌,张力,Jing Yang,Luo Jianbin,&Zhang Li.(2010).一种新型微致动元件的制作及特性研究..
MLA	荆阳,et al."一种新型微致动元件的制作及特性研究".(2010).

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