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	An atomic force microscope head designed for nanometrology
	Mingzhen Lu ; Sitian Gao ; Qihai Jin ; Jianjun Cui ; Hua Du ; Hongtang Gao
	2010-05-10 ; 2010-05-10
关键词	Practical Experimental/ atomic force microscopy displacement measurement interferometers laser beams nanotechnology optical deflectors optical fibre polarisation semiconductor lasers/ atomic force microscope head design nanometrology AFM head design sensing component nano measuring machine nanometrological instrument reference mirrors displacement measurement interferometers optical beam deflection method laser beam singlemode polarization-maintaining optical fibre external laser diode optical lever force-distance curve gauge block 0.05 nm 2 mm 50 mm 100 mm/ A0779 Scanning probe microscopy and related techniques A0630C Spatial variables measurement A4281F Other fibre optical properties B7320C Spatial variables measurement B4125 Fibre optics/ size 5.0E-11 m size 2.0E-03 m size 5.0E-02 m size 1.0E-01 m
中文摘要	An atomic force microscope (AFM) head designed for nanometrology is accomplished in this study. It is the sensing component of the nano-measuring machine, a nanometrological instrument with a working range of 50 mm * 50 mm * 2 mm, as well as a part of the metrological system of the instrument. Three reference mirrors are mounted on the head and arranged without Abbe error. Relative displacement of the AFM head and the specimen is measured by interferometers and results are traceable. The optical beam deflection method is used to detect the atomic force. The laser beam is introduced through a single-mode polarization-maintaining optical fibre from an external laser diode. With a compact design, a 100 mm optical lever is realized inside the AFM head that is less than 20 mm in thickness and 200 g in weight. A force-distance curve is obtained using a gauge block in a test. Furthermore, online tests of the measurement of a step scale have been made. According to the calculation and experimental verification, the resolution of our AFM head reaches 0.05 nm.
语种	英语 ; 英语
出版者	IOP Publishing ; UK
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/25138]
专题	清华大学
推荐引用方式 GB/T 7714	Mingzhen Lu,Sitian Gao,Qihai Jin,et al. An atomic force microscope head designed for nanometrology[J],2010, 2010.
APA	Mingzhen Lu,Sitian Gao,Qihai Jin,Jianjun Cui,Hua Du,&Hongtang Gao.(2010).An atomic force microscope head designed for nanometrology..
MLA	Mingzhen Lu,et al."An atomic force microscope head designed for nanometrology".(2010).

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