QQ客服 官方微博 反馈留言

	Compensation for bias in capacitive micro accelerometer
	Liu Min-jie ; Dong Jing-xin
	2010-05-10 ; 2010-05-10
关键词	Practical/ accelerometers capacitance measurement/ capacitive micro accelerometer charge based capacitance measurement/ B7230 Sensing devices and transducers B7320E Velocity, acceleration and rotation measurement B7310J Impedance and admittance measurement
中文摘要	To overcome the bias problem existed in micro accelerometer systems, a binary-weighted micro- capacitance array was designed. The method of charge based capacitance measurement (CBCM) was introduced, and verified to be about 0.0 lfF in precision. The simulation was made on micro-capacitance array using CBCM with 0.18 mu m one-ploy six-metal CMOS process, and a comparative precision of 1.23% is achieved which proved that the method of micro-capacitance array is feasible.
语种	中文 ; 中文
出版者	Editorial Department of the Journal of Chinese Inertial Technology ; China
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/24501]
专题	清华大学
推荐引用方式 GB/T 7714	Liu Min-jie,Dong Jing-xin. Compensation for bias in capacitive micro accelerometer[J],2010, 2010.
APA	Liu Min-jie,&Dong Jing-xin.(2010).Compensation for bias in capacitive micro accelerometer..
MLA	Liu Min-jie,et al."Compensation for bias in capacitive micro accelerometer".(2010).

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。