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	Closed-loop system linearity of a comb-finger micro-accelerometer
	Wu Tianzhun ; Dong Jingxin ; Zhao Changde ; Feng Yuxiang
	2010-05-10 ; 2010-05-10
关键词	Theoretical or Mathematical/ accelerometers closed loop systems electrometers least squares approximations mathematical analysis mechanical variables measurement micromechanical devices micrometry testing/ comb-finger microaccelerometer closed-loop system linearity centrifugal test least squared criterion cubic mathematic model electrometric method mechanical parameters measurement static rolling test/ B7320E Velocity, acceleration and rotation measurement B2575 Micromechanical device technology B7320G Mechanical variables measurement B7320C Spatial variables measurement B0220 Mathematical analysis B0170E Production facilities and engineering B0290F Interpolation and function approximation (numerical analysis) E3640 Measurement and control instrumentation industry E1620 Measurement E2160 Micromechanics (mechanical engineering) E1640 Instrumentation E0210C Mathematical analysis E0210L Numerical analysis
中文摘要	To clarify the relation between linearity of a micro-accelerometer and the input acceleration in a centrifugal test, a cubic mathematic model is built and the least squared criterion is applied in the analysis of closed-loop system output. Linearity formulae are put forward and proved that the linearity is a quadric function of input, and relates to open-loop gain of low frequency band. The formulae indicate theoretical means to improve linearity by altering electrical and structural parameters. Electrometric method is used to measure mechanical parameters, and the formulae are verified by centrifugal testing data. The result shows that linearity can be estimated according to the mathematic model obtained in the static rolling test, and calculated values are close to corresponding measured values.
语种	中文 ; 中文
出版者	Chinese J. Mech. Eng ; China
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/24421]
专题	清华大学
推荐引用方式 GB/T 7714	Wu Tianzhun,Dong Jingxin,Zhao Changde,et al. Closed-loop system linearity of a comb-finger micro-accelerometer[J],2010, 2010.
APA	Wu Tianzhun,Dong Jingxin,Zhao Changde,&Feng Yuxiang.(2010).Closed-loop system linearity of a comb-finger micro-accelerometer..
MLA	Wu Tianzhun,et al."Closed-loop system linearity of a comb-finger micro-accelerometer".(2010).

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