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	The back-diffusion effect of air on the discharge characteristics of atmospheric-pressure radio-frequency glow discharges using bare metal electrodes
	Sun, Wen-Ting ; Liang, Tian-Ran ; Wang, Hua-Bo ; Li, He-Ping ; Bao, Cheng-Yu
	2010-05-10 ; 2010-05-10
关键词	CAPACITIVE PLASMA SOURCE SILICON DIOXIDE FILMS SURFACE-TREATMENT ALPHA-MODE GAMMA-MODE JET DEPOSITION GAS DECONTAMINATION STERILIZATION Physics, Fluids & Plasmas
中文摘要	Radio-frequency (RF), atmospheric-pressure glow discharge (APGD) plasmas using bare metal electrodes have promising prospects in the fields of plasma-aided etching, deposition, surface treatment, disinfection, sterilization, etc. In this paper, the discharge characteristics, including the breakdown voltage and the discharge voltage for sustaining a stable and uniform a mode discharge of the RF APGD plasmas are presented. The experiments are conducted by placing the home-made planar-type plasma generator in ambient and in a vacuum chamber, respectively, with helium as the primary plasma-forming gas. When the discharge processes occur in ambient, particularly for the lower plasma-working gas flow rates, the experimental measurements show that it is the back-diffusion effect of air in atmosphere, instead of the flow rate of the gas, that results in the obvious decrease in the breakdown voltage with increasing plasma-working gas flow rate. Further studies on the discharge characteristics, e.g. the luminous structures, the concentrations and distributions of chemically active species in plasmas, with different plasma-working gases or gas mixtures need to be conducted in future work.
语种	英语 ; 英语
出版者	IOP PUBLISHING LTD ; BRISTOL ; DIRAC HOUSE, TEMPLE BACK, BRISTOL BS1 6BE, ENGLAND
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/22130]
专题	清华大学
推荐引用方式 GB/T 7714	Sun, Wen-Ting,Liang, Tian-Ran,Wang, Hua-Bo,et al. The back-diffusion effect of air on the discharge characteristics of atmospheric-pressure radio-frequency glow discharges using bare metal electrodes[J],2010, 2010.
APA	Sun, Wen-Ting,Liang, Tian-Ran,Wang, Hua-Bo,Li, He-Ping,&Bao, Cheng-Yu.(2010).The back-diffusion effect of air on the discharge characteristics of atmospheric-pressure radio-frequency glow discharges using bare metal electrodes..
MLA	Sun, Wen-Ting,et al."The back-diffusion effect of air on the discharge characteristics of atmospheric-pressure radio-frequency glow discharges using bare metal electrodes".(2010).

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