| Enhancement of the orientation and adhesion of Al films on LiNbO3 with Ni underlayer | |
| Li, DM ; Pan, F ; Niu, JB ; Liu, M | |
| 2010-05-10 ; 2010-05-10 | |
| 关键词 | metal materials Al/Ni films electron-beam evaporation microstructure surface acoustic wave ACOUSTIC-WAVE DEVICES POWER DURABILITY ELECTRODES FILTERS GROWTH Materials Science, Multidisciplinary Metallurgy & Metallurgical Engineering |
| 中文摘要 | Al/Ni films were deposited on 128 degrees Y-X LiNbO3 substrates by e-beam deposition. The influence of Ni underlayer on the microstructure, adhesion and resistivity of the Al/Ni films was investigated. It was found that Al films deposited on Ni underlayer thinner than 5 nm possessed strong texture. The textured Al/Ni films had a superior adhesion. Their resistivity decreased after annealing treatment at 200 degrees C for 30 min. With the textured Al/Ni films, a 2.30 GHz-range image-impedance connection SAW (Surface Acoustic Wave) filter was successfully fabricated. |
| 语种 | 英语 ; 英语 |
| 出版者 | NONFERROUS METALS SOCIETY CHINA ; BEIJING ; NO. 30 XUEYUAN RD, BEIJING 100083, PEOPLES R CHINA |
| 内容类型 | 期刊论文 |
| 源URL | [http://hdl.handle.net/123456789/21325]  |
| 专题 | 清华大学 |
| 推荐引用方式 GB/T 7714 | Li, DM,Pan, F,Niu, JB,et al. Enhancement of the orientation and adhesion of Al films on LiNbO3 with Ni underlayer[J],2010, 2010. |
| APA | Li, DM,Pan, F,Niu, JB,&Liu, M.(2010).Enhancement of the orientation and adhesion of Al films on LiNbO3 with Ni underlayer.. |
| MLA | Li, DM,et al."Enhancement of the orientation and adhesion of Al films on LiNbO3 with Ni underlayer".(2010). |
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