QQ客服 官方微博 反馈留言

	Highly precise nonlinear error calibrating system based on Fabry-Perot interferometer - art. no. 68342X
	Ma, Jichi ; Li, Yan ; Yin, Chunyong
	2010-05-10 ; 2010-05-10
会议名称	OPTICAL DESIGN AND TESTING III, PTS 1 AND 2 ; Conference on Optical Design and Testing III ; Beijing, PEOPLES R CHINA ; Web of Science
关键词	nanometer measurement F-P cavity beat frequency interferometer air refractive index nonlinear error calibration Optics
中文摘要	Nanometer measurement has become more and more important in the development of metrology, material science, microelectronics and biology. Heterodyne Fabry-Parot interferometer can be used in the nonlinear error calibration with an accuracy of nanometer and sub-nanometer order. We can get very high resolution by using heterodyne Fabry-Parot interferometer frequency locking technique in theory. However, the measure uncertainty and the stability of results are worse than the expectation's. In this paper, in order to solve the problems of air refrective index change and temperature excursion, we designed the vacuum system that adjusts the interference light path and built it based on NIM's heterodyne Fabry-Parot interferometer. The key in our design is to reduce the thermic balance time and to ensure reliable hermetization of movable components. The influnce of the change of air refractive index to the measured precision was studied, and the approximate formula of vacuum degree that the system requires was concluded. It has been proved in the experiment that the system works steadily. The system's ability of anti-jamming has been improved, and the demand of the measure surroundings has been lowered. Comparing with capacitance displacement measurement instrument, we conclude that the nonlinear degree of this system in the range of 0.35um, which is longer than half of the wavelength of the laser, is better than 3.9nm.
会议录出版者	SPIE-INT SOC OPTICAL ENGINEERING ; BELLINGHAM ; 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA
语种	英语 ; 英语
内容类型	会议论文
源URL	[http://hdl.handle.net/123456789/19385]
专题	清华大学
推荐引用方式 GB/T 7714	Ma, Jichi,Li, Yan,Yin, Chunyong. Highly precise nonlinear error calibrating system based on Fabry-Perot interferometer - art. no. 68342X[C]. 见:OPTICAL DESIGN AND TESTING III, PTS 1 AND 2, Conference on Optical Design and Testing III, Beijing, PEOPLES R CHINA, Web of Science.

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。