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	Structure of the coatings onto ceramic cutting tools deposited by pulsed high energy density plasma
	Miao, HZ ; Peng, ZJ ; Qi, LH ; Shi, F ; Si, WJ
	2010-05-10 ; 2010-05-10
会议名称	HIGH-PERFORMANCE CERAMICS III, PTS 1 AND 2 ; 3rd China International Conference on High-Performance Ceramics (CICC-3) ; Shenzhen, PEOPLES R CHINA ; Web of Science
关键词	PHEDP ceramic cutting tools TiN TiCN (Ti,Al)N structure FILMS HARD Materials Science, Ceramics Materials Science, Composites
中文摘要	With a newly-developed technique, pulsed high energy density plasma (PHEDP), TiN, TiCN, and (Ti,Al)N coatings were deposited onto silicon nitride and cemented carbide cutting tools. The structures of these coatings were systematically investigated in this paper. The average surface roughness (Ra) of the coated tools were ranged in 20similar to150 nm. The smooth surface of coated tools means that the coatings are promising candidate for cutting tools of high precision and it is in favor of reducing the fiction coefficients and flank wear of tools. The coating thickness varied, in the range of 3similar to20 mum, with the deposition conditions of the shot number of pulsed plasma, and the voltages between the inner and outer electrodes of the coaxial gun. The coating has a densified structure compared to the substrate structure and almost no pores and cracks exist in the coating surface. The grain sizes of the coating were small (<100nm), much finer than those of the substrate (>2 mum). Except for TiN-Si3N4 system, no apparent columnar grain structure as presented predominantly in typical vapor deposited coatings was observed. In fact, an equiaxed structure was presented, due to the pulsed mode of plasma bombardment and solid solution strengthening of C or Al into TiN lattices, resulting in disruption, through renucleation, of epitaxy on individual columns. A continuous and densified interface was observed. All these characteristics in structures promised an excellent performance of the coated tools.
会议录出版者	TRANS TECH PUBLICATIONS LTD ; ZURICH-UETIKON ; BRANDRAIN 6, CH-8707 ZURICH-UETIKON, SWITZERLAND
语种	英语 ; 英语
内容类型	会议论文
源URL	[http://hdl.handle.net/123456789/18247]
专题	清华大学
推荐引用方式 GB/T 7714	Miao, HZ,Peng, ZJ,Qi, LH,et al. Structure of the coatings onto ceramic cutting tools deposited by pulsed high energy density plasma[C]. 见:HIGH-PERFORMANCE CERAMICS III, PTS 1 AND 2, 3rd China International Conference on High-Performance Ceramics (CICC-3), Shenzhen, PEOPLES R CHINA, Web of Science.

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