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	Measurements of ferroelectric MEMS microphones
	Wu, XM ; Yang, Y ; Cai, J ; Ren, TL ; Liu, LT
	2010-05-07 ; 2010-05-07
会议名称	INTEGRATED FERROELECTRICS ; 16th International Symposium on Integrated Ferroelectrics/5th Korean Workshop on High Dielectric Devices and Materials ; Gyeongju, SOUTH KOREA ; Web of Science ; INSPEC
关键词	MEMS microphone ferroelectric SILICON MICROPHONES Engineering, Electrical & Electronic Physics, Applied Physics, Condensed Matter
中文摘要	This paper introduces three measurement methods of ferro-MEMS microphone in the fields of acoustics, piezoelectronics and mechanics respectively. The results of the three measurements are close to each other in some respects, such as frequency response, resonant frequency, quality value and so on. And they together discover the total characteristics of ferro-MEMS microphone which is hard to be obtained in only one measurement. Especially, a typical TO-CAN packaged ferro-MEMS microphone is presented and coupler measurement technology is discussed for acoustics measurement. Resonance measurement and vibration measurement of microphone membrane are taken mainly to confirm the resonant frequency and frequency response of microphone membrane. All measurement results agree well with theoretical estimation. In the case of ferro-MEMS microphone with membrane size of 2.5 mm x 2.5 mm, the resonant frequency of membrane is 13 kHz, quality factor is about 8. And the sensitivity of the microphone is -36 dB(15 mV/Pa) @ 1 kHz.
会议录出版者	TAYLOR & FRANCIS LTD ; ABINGDON ; 4 PARK SQUARE, MILTON PARK, ABINGDON OX14 4RN, OXON, ENGLAND
语种	英语 ; 英语
内容类型	会议论文
源URL	[http://hdl.handle.net/123456789/16865]
专题	清华大学
推荐引用方式 GB/T 7714	Wu, XM,Yang, Y,Cai, J,et al. Measurements of ferroelectric MEMS microphones[C]. 见:INTEGRATED FERROELECTRICS, 16th International Symposium on Integrated Ferroelectrics/5th Korean Workshop on High Dielectric Devices and Materials, Gyeongju, SOUTH KOREA, Web of Science, INSPEC.

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