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	Design optimization of piezoelectric folded cantilever microactuators for low voltage application
	Fang Hua-jun ; Liu Li-tian
	2010-05-07 ; 2010-05-07
关键词	Practical Theoretical or Mathematical/ cantilevers finite element analysis microactuators optimisation piezoelectric actuators reliability/ piezoelectric folded cantilever microactuator low voltage application design optimization numerical FEM device reliability single crystal silicon layer/ B8380M Microactuators B2860A Piezoelectric devices B0290T Finite element analysis B0260 Optimisation techniques
中文摘要	Piezoelectric folded cantilever microactuators are optimized for low voltage application, with the combination of theoretical analysis and numerical FEM. Firstly, the optimal structural parameters of the device are obtained by theoretical analysis, then the theoretical results are verified through FEM simulation. In the course of designing, with the comprehensive consideration of fabrication process, applied conditions, reliability of the device, the optimal design is achieved with tradeoff among the length of piezoelectric beams, the thickness of single crystal silicon layer, the number of levels of folded cantilevers, and the applied voltage, with which the best parameters of the device are concluded for low voltage application.
语种	中文 ; 中文
出版者	Southeast University ; China
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/16598]
专题	清华大学
推荐引用方式 GB/T 7714	Fang Hua-jun,Liu Li-tian. Design optimization of piezoelectric folded cantilever microactuators for low voltage application[J],2010, 2010.
APA	Fang Hua-jun,&Liu Li-tian.(2010).Design optimization of piezoelectric folded cantilever microactuators for low voltage application..
MLA	Fang Hua-jun,et al."Design optimization of piezoelectric folded cantilever microactuators for low voltage application".(2010).

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