Laser-nanomachining by microsphere induced photonic nanojet

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	Laser-nanomachining by microsphere induced photonic nanojet
	Wen YD(文扬东); Wang FF(王飞飞); Yu HB(于海波); Li P(李盼); Liu LQ(刘连庆); Li WR(李文荣); Li WJ(李文荣)
刊名	Sensors and Actuators, A: Physical
	2017
卷号	258 页码:115-122
关键词	Laser-nanomachining Photonic nanojet
ISSN号	0924-4247
通讯作者	刘连庆 ; 李文荣
产权排序	1
中文摘要	The photonic nanojet generated by microsphere-based modulation of incident light has attracted much research attention in recent years because its full width at half maximum (FWHM) is less than the optical diffraction limit, which enables the microsphere to serve as a superlens to achieve super-resolution imaging. In addition to its sub-diffraction limited FWHM, the intensity of the photonic nanojet is also enhanced by several times that of the incident light. Here, we report sub-micrometer features that can be fabricated on MEMS-related materials by simply using a laser-induced photonic nanojet through microspheres. The influences of the diameter of silica microspheres and the initial power of laser beams on “nano-drilling” cavities on substrates were experimentally studied. Compared to the experiments without the microspheres, the resolution of the laser-micromachined structures was markedly improved using our approach. We have shown that it is possible to use a laser beam with initial beam width of 5 μm to fabricate 250 nm diameter cavities on silica substrates. We further simulated the photonic nanojet created by silica microspheres using the finite-difference time-domain (FDTD) computational technique to gain insights into the physical mechanisms of the photonic nanojet and its influence on the final nano-drilling results. This photonic nanojet-based nano-drilling method presents new opportunities for low-cost, high-throughput fabrication of nanoscale devices in the future.
收录类别	SCI ; EI
语种	英语
WOS记录号	WOS:000400718200015
内容类型	期刊论文
源URL	[http://ir.sia.cn/handle/173321/20292]
专题	沈阳自动化研究所_机器人学研究室
通讯作者	Li WJ(李文荣)
推荐引用方式 GB/T 7714	Wen YD,Wang FF,Yu HB,et al. Laser-nanomachining by microsphere induced photonic nanojet[J]. Sensors and Actuators, A: Physical,2017,258:115-122.
APA	Wen YD.,Wang FF.,Yu HB.,Li P.,Liu LQ.,...&Li WJ.(2017).Laser-nanomachining by microsphere induced photonic nanojet.Sensors and Actuators, A: Physical,258,115-122.
MLA	Wen YD,et al."Laser-nanomachining by microsphere induced photonic nanojet".Sensors and Actuators, A: Physical 258(2017):115-122.