Thermal stability of tungsten sub-nitride thin film prepared by reactive magnetron sputtering | |
Zhang, X. X.1,3; Wu, Y. Z.1; Mu, B.2; Qiao L(乔丽)3; Li, W. X.4; Li, J. J.4; Wang P(王鹏)3; Wang P(王鹏) | |
刊名 | Journal of Nuclear Materials |
2017 | |
卷号 | 485页码:1-7 |
关键词 | Magnetron sputtering Tungsten sub-nitride Thermal stability Structure Annealing Thermal desorption spectroscopy |
ISSN号 | 0022-3115 |
通讯作者 | Wu, Y. Z. ; 王鹏 |
英文摘要 | Tungsten sub-nitride thin films deposited on silicon samples by reactive magnetron sputtering were used as a model system to study the phase stability and microstructural evolution during thermal treatments. XRD, SEM&FIB, XPS, RBS and TDS were applied to investigate the stability of tungsten nitride films after heating up to 1473 K in vacuum. At the given experimental parameters a 920 nm thick crystalline film with a tungsten and nitrogen stoichiometry of 2:1 were achieved. The results showed that no phase and microstructure change occurred due to W2N film annealing in vacuum up to 973 K. Heating up to 1073 K led to a partial decomposition of the W2N phase and the formation of a W enrichment layer at the surface. Increasing the annealing time at the same temperature, the further decomposition of the W2N phase was negligible. The complete decomposition of W2N film happened as the temperature reached up to 1473 K. |
学科主题 | 材料科学与物理化学 |
收录类别 | SCI |
资助信息 | the National Natural Science Foundation of China (Grant No: 11475236) |
语种 | 英语 |
WOS记录号 | WOS:000394079200001 |
内容类型 | 期刊论文 |
源URL | [http://210.77.64.217/handle/362003/21515] |
专题 | 兰州化学物理研究所_固体润滑国家重点实验室 |
通讯作者 | Wang P(王鹏) |
作者单位 | 1.Lanzhou Univ Technol, Sch Mat Sci & Engn, Lanzhou 730050, Peoples R China 2.Lanzhou Univ Technol, Coll Petrochem Technol, Lanzhou 730050, Peoples R China 3.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730050, Peoples R China 4.Chinese Acad Sci, Beijing Natl Lab Condensed Matter Phys, Inst Phys, Beijing 100190, Peoples R China |
推荐引用方式 GB/T 7714 | Zhang, X. X.,Wu, Y. Z.,Mu, B.,et al. Thermal stability of tungsten sub-nitride thin film prepared by reactive magnetron sputtering[J]. Journal of Nuclear Materials,2017,485:1-7. |
APA | Zhang, X. X..,Wu, Y. Z..,Mu, B..,Qiao L.,Li, W. X..,...&王鹏.(2017).Thermal stability of tungsten sub-nitride thin film prepared by reactive magnetron sputtering.Journal of Nuclear Materials,485,1-7. |
MLA | Zhang, X. X.,et al."Thermal stability of tungsten sub-nitride thin film prepared by reactive magnetron sputtering".Journal of Nuclear Materials 485(2017):1-7. |
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