Fabrication and characterization of HfC/SiC nanomultilayered films with enhanced mechanical properties

CORC > 上海硅酸盐研究所 > 中国科学院上海硅酸盐研究所 > 特种无机涂层重点实验室 > 期刊论文

	Fabrication and characterization of HfC/SiC nanomultilayered films with enhanced mechanical properties
	Li, Wei 1,2; Meng, Jia 2; Liu, Ping 1; Du, Haoming 1; Zhang, Ke 1; Ma, Fengcang 1; Liu, Xinkuan 1; Chen, Xiaohong 1
刊名	VACUUM
	2016-06-01
卷号	128 页码:230-233
关键词	HfC/SiC nanomultilayered film Microstructure Epitaxial growth Mechanical property Strengthening mechanism
英文摘要	A series of HfC/SiC nanomultilayered films with different SiC layer thickness were synthesized by reactive magnetron sputtering. The effect of SiC layer thickness on the microstructure and mechanical properties of HfC/SiC nanomultilayered films were studied. When SiC layer thickness was less than 0.9 nm, originally amorphous SiC layers were forced to crystallize and grow epitaxially with HfC layers, resulting in the improvement of crystallization integrality and enhancement in hardness and elastic modulus. The maximum hardness and elastic modulus could reach 36.2 GPa and 419 GPa, respectively. With further increase of SiC layer thickness, SiC layers changed back to amorphous state and damaged the epitaxial growth structure, leading to deterioration of mechanical properties. (C) 2016 Elsevier Ltd. All rights reserved.
WOS标题词	Science & Technology ; Technology ; Physical Sciences
类目[WOS]	Materials Science, Multidisciplinary ; Physics, Applied
研究领域[WOS]	Materials Science ; Physics
关键词[WOS]	MULTILAYER COATINGS ; ELASTIC-MODULUS ; HARDNESS ; HFC ; COMPOSITES ; TIN/NBN ; GROWTH ; NICKEL
收录类别	SCI
语种	英语
WOS记录号	WOS:000376052500032
内容类型	期刊论文
源URL	[http://ir.sic.ac.cn/handle/331005/23085]
专题	上海硅酸盐研究所_特种无机涂层重点实验室_期刊论文
作者单位	1.Univ Shanghai Sci & Technol, Sch Mat Sci & Engn, Shanghai 200093, Peoples R China 2.Chinese Acad Sci, Key Lab Inorgan Coating Mat, Shanghai 200050, Peoples R China
推荐引用方式 GB/T 7714	Li, Wei,Meng, Jia,Liu, Ping,et al. Fabrication and characterization of HfC/SiC nanomultilayered films with enhanced mechanical properties[J]. VACUUM,2016,128:230-233.
APA	Li, Wei.,Meng, Jia.,Liu, Ping.,Du, Haoming.,Zhang, Ke.,...&Chen, Xiaohong.(2016).Fabrication and characterization of HfC/SiC nanomultilayered films with enhanced mechanical properties.VACUUM,128,230-233.
MLA	Li, Wei,et al."Fabrication and characterization of HfC/SiC nanomultilayered films with enhanced mechanical properties".VACUUM 128(2016):230-233.