Integrated Behavior Simulation and Verification for a MEMS Vibratory Gyroscope Using Parametric Model Order Reduction

	Integrated Behavior Simulation and Verification for a MEMS Vibratory Gyroscope Using Parametric Model Order Reduction
	Honglong Chang; Yafei Zhang; Jianbing Xie; Zhiguang Zhou; Weizheng Yuan
刊名	JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
	2010
卷号	19 期号:2 页码:282-293
英文摘要	In this paper, a parameterized reduced model of a vibratory microelectromechanical systems (MEMS) gyroscope is established using a parametricmodel order reduction algorithm. In the reduction process, not only the input angular velocity, material density, Young's modulus, and Rayleigh damping coefficient but also the coefficient of thermal expansion and the change in temperature were all preserved. Based on this model, the integrated behaviorsimulation of the MEMS gyroscope, including many environmental factors in engineering situations, was performed in an accurate and fast way. Compared with the finite-element method, the relative error of the reduced-order model was less than 4.2%, while the computational efficiency was improved about five times. The cosimulation with a complete interface circuit was successfully performed in a very fast way, which provides a convenient platform for designers to evaluate the performance of sensors. The experimental verification proves that the reduced model can provide a reliablesimulation result, although some errors exist.
收录类别	SCI
原文出处	http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=5393089
语种	英语
内容类型	期刊论文
源URL	[http://ir.siat.ac.cn:8080/handle/172644/3148]
专题	深圳先进技术研究院_其他
作者单位	JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
推荐引用方式 GB/T 7714	Honglong Chang,Yafei Zhang,Jianbing Xie,et al. Integrated Behavior Simulation and Verification for a MEMS Vibratory Gyroscope Using Parametric Model Order Reduction[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,2010,19(2):282-293.
APA	Honglong Chang,Yafei Zhang,Jianbing Xie,Zhiguang Zhou,&Weizheng Yuan.(2010).Integrated Behavior Simulation and Verification for a MEMS Vibratory Gyroscope Using Parametric Model Order Reduction.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,19(2),282-293.
MLA	Honglong Chang,et al."Integrated Behavior Simulation and Verification for a MEMS Vibratory Gyroscope Using Parametric Model Order Reduction".JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 19.2(2010):282-293.