Investigation on the laser ablation of SiC ceramics using micro-Raman mapping technique

CORC > 上海硅酸盐研究所 > 中国科学院上海硅酸盐研究所 > 结构陶瓷与复合材料工程研究中心 > 期刊论文

	Investigation on the laser ablation of SiC ceramics using micro-Raman mapping technique
	Fu, Chaoli 1,2; Yang, Yong 1; Huang, Zhengren 1; Liu, Guiling 1; Zhang, Hui 1; Jiang, Fang 1; Wei, Yuquan 1; Jiao, Zheng 2
刊名	JOURNAL OF ADVANCED CERAMICS
	2016-09-01
卷号	5 期号:3 页码:253-261
关键词	silicon carbide (SiC) laser ablation micro-Raman mapping technique decomposition oxidation
英文摘要	Research on the laser ablation behavior of SiC ceramics has great significance for the improvement of their anti-laser ability as high-performance mirrors in space and lasers, or the laser surface micro-machining technology as electronic components in micro-electron mechanical systems (MEMS). In this work, the laser ablation of SiC ceramics has been performed by using laser pulses of 12 ns duration at 1064 nm. The laser induced damage threshold (LIDT) below 0.1 J/cm(2) was obtained by 1-on-1 mode and its damage morphology appeared in the form of "burning crater" with a clear boundary. Micro-Raman mapping technique was first introduced in our study on the laser ablation mechanisms of SiC surface by identifying physical and chemical changes between uninjured and laser-ablated areas. It has been concluded that during the ablation process, SiC surface mainly underwent decomposition to the elemental Si and C, accompanied by some transformation of crystal orientation. The oxidation of SiC also took place but only in small amount on the edges of target region, while there was no hint of SiO2 in the center with higher energy density, maybe because of deficiency of O-2 atmosphere in the ablated area, elimination of SiO2 by carbon at 1505 degrees C, or evaporating at 2230 degrees C.
WOS标题词	Science & Technology ; Technology
类目[WOS]	Materials Science, Ceramics
研究领域[WOS]	Materials Science
关键词[WOS]	SILICON-CARBIDE ; THIN-FILM ; FEMTOSECOND ; SPECTROSCOPY ; CARBON ; DAMAGE ; DEPENDENCE ; INTERFACE ; POLYTYPES ; CRYSTALS
收录类别	SCI
语种	英语
WOS记录号	WOS:000385024300009
内容类型	期刊论文
源URL	[http://ir.sic.ac.cn/handle/331005/22013]
专题	上海硅酸盐研究所_结构陶瓷与复合材料工程研究中心_期刊论文
作者单位	1.Chinese Acad Sci, Shanghai Inst Ceram, Struct Ceram Engn Res Ctr, 1295 Dingxi Rd, Shanghai 200050, Peoples R China 2.Shanghai Univ, Coll Environm & Chem Engn, 99 Shangda Rd, Shanghai 200444, Peoples R China
推荐引用方式 GB/T 7714	Fu, Chaoli,Yang, Yong,Huang, Zhengren,et al. Investigation on the laser ablation of SiC ceramics using micro-Raman mapping technique[J]. JOURNAL OF ADVANCED CERAMICS,2016,5(3):253-261.
APA	Fu, Chaoli.,Yang, Yong.,Huang, Zhengren.,Liu, Guiling.,Zhang, Hui.,...&Jiao, Zheng.(2016).Investigation on the laser ablation of SiC ceramics using micro-Raman mapping technique.JOURNAL OF ADVANCED CERAMICS,5(3),253-261.
MLA	Fu, Chaoli,et al."Investigation on the laser ablation of SiC ceramics using micro-Raman mapping technique".JOURNAL OF ADVANCED CERAMICS 5.3(2016):253-261.