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题名	同步移相横向剪切干涉测量技术的研究
作者	郭小娴
学位类别	硕士
答辩日期	2009
授予单位	中国科学院上海光学精密机械研究所
导师	曾爱军
关键词	剪切干涉 同步移相 波面测量 平行分束 偏振
其他题名	Study of simultaneous phase-shifting lateral shearing interferometry
中文摘要	干涉测量技术具有非接触、高精度、高空间分辨率等优点，在光学测试、微电子制造、精密机械加工等领域得到了广泛的应用。作为干涉测量技术的一个重要分支，横向剪切干涉测量技术将被测波前与其横向剪切复制的波前进行干涉，无需标准参考面且结构简单、紧凑、稳定，是最为有效的波面检测手段之一。为了进一步提高灵敏度和测量精度并实现干涉图的自动化处理，横向剪切干涉测量技术与移相技术相结合而发展为移相横向剪切干涉测量技术。现有移相横向剪切干涉技术主要采用时域移相技术，移相量难以准确控制，移相过程易受环境因素干扰，难以实现波面的实时检测。为克服现有时域移相横向剪切干涉技术的不足，本论文提出了同步移相横向剪切干涉测量技术。本论文的主要研究内容包括： 1．介绍了用于波面检测的哈特曼传感器和剪切干涉仪，给出了时域移相的原理与方法，综述了现有的移相剪切干涉测量技术。详细介绍了偏振光理论基础，阐述了偏振光干涉的基本原理，分析了现有的偏振移相技术。 2．研究了剪切量可调的横向剪切干涉测量技术。理论分析了厚波片进行平行偏振分束时其出射光的分束量、光程差与入射角之间的变化特性，提出了厚波片两次分束进行光程差补偿的剪切量可调等光程平行偏振分束方法，给出了两块厚波片透射式两次分束、单块厚波片反射式两次分束的两种光路结构。研究了厚波片单次分束的非等光程剪切量可调横向剪切干涉测量技术和厚波片两次分束的等光程剪切量可调横向剪切干涉测量技术，通过实验研究获得了剪切量随厚波片转动角度变化的系列横向剪切干涉图，验证了剪切量可调的平行偏振分束方法与横向剪切干涉测量技术的有效性。 3．研究了平行分束同步移相技术。提出了平行消偏振分束、平行偏振分束相结合的平行分束同步移相技术，设计了萨瓦偏光镜平行偏振分束的同步移相器、立方棱镜与直角棱镜组合的平行分束同步移相器，它们集成了分光光路、移相光路和检偏光路，具有空间一致性高、移相量精确稳定、结构简单紧凑等特点。对平行分束同步移相器中的非等步长移相问题进行了探讨，给出了非等步长移相算法。将平行分束同步移相器与偏振菲索干涉光路相结合形成了同步移相菲索干涉仪，开展了同步移相菲索干涉测量实验研究，实验结果验证了平行分束同步移相技术的有效性。 4．研究了同步移相横向剪切干涉测量技术。将偏振横向剪切干涉技术与平行分束同步移相技术相结合，提出了同步移相横向剪切干涉测量技术。利用波面曲率半径逐渐变化的激光对该技术进行了实验研究，实验结果表明该技术可以用于波面的实时测量。针对移相横向剪切干涉图的相位解包裹、波面重建等后期信息处理需求，初步研究了移相横向剪切干涉图的相位解包裹算法和波面重建算法，对其进行了相应的计算机模拟并给出了有效的模拟结果。
英文摘要	Interferometry has many advantages such as non-contact measurement, high precision and high spatial resolution. It is widely used in optical testing, microelectronics manufacturing and precision machining and so on. Lateral shearing interferometry is an important branch of interferometry. The lateral shearing interferometer needs no standard reference plane and has a simple, compact and stable structure. It has become one of the most effective methods for wavefront measurement. In order to improve its sensitivity and accuracy and realize automatic proceeding of interferogram, lateral shearing interferometer is combined with a phase shifter to develop as a phase-shifting lateral shearing interferometer. In existing phase-shifting lateral shearing interferometer, temporal phase-shifting technology is adopted. The amount of phase shift is difficult to be accurately controlled. The precision is influenced by the environment vibration. It can not be applied in real-time wavefront measurement. To meet the need of real-time wavefront measurement, simultaneous phase-shifting lateral shearing interferometry is proposed in this thesis. The research contents include: 1. Wavefront measurement using Hartmann wavefront sensor and shearing interferometry are introduced. Phase-shifting shearing interferometry is compared and its temporal phase-shifting methods are summarized. Detailed theory of polarization light is introduced. Interference of polarization light is exposited. Polarization phase-shifting technologies are analyzed. 2. The relationships between the shearing amount, the optical path difference and the incident angle are theoretically analyzed for a rotated thick waveplate. A parallel polarization beamsplitting method with adjustable shearing amount is proposed. In this method, the beam is split twice to compensate optical path difference. Its two structures are given. One is transmission-type structure using two thick waveplates. Another is reflection-type structure using one thick waveplate. Lateral shearing interferometers with adjustable shearing amount are researched. The interferometer using single beamsplitting and double beamsplitting are respectively a nonequal and an equal optical path system. The usefulness of parallel polarization beamsplitting method and lateral shearing interferometry is verified by experimental results. 3. Based on parallel non-polarization and polarization beamsplitting, a simultaneous phase-shifting technology is proposed. Two simultaneous phase shifters using a Savart polariscope and a combination of a block prism and a rectangular prism as parallel polarization beamsplitter are designed. In the phase shifters, beam splitting, phase shifting and polarization analyzing are integrated to obtain high spatial consistency, accurate and stable amount of phase shift and simple structure. The problem of phase shifting with unequal steps in the simultaneous phase-shifter is discussed. The phase shifting algorithm with unequal steps is given. The simultaneous phase-shifting interferometry is experimentally researched with combining of simultaneous phase-shifter and polarization Fizeau interferometry. 4. Simultaneous phase-shifting lateral shearing interferometer is proposed. It is formed by combining a parallel polarization beamsplitter and a simultaneous phase-shifter. It is suitable for the real-time wavefront measurement. Its usefulness is verified by experiment results. Wavefront information is extracted from phase-shifting lateral shearing interferograms by phase unwrapping and wavefront rebuilding. The phase unwrapping algorithm and the wavefront rebuilding algorithm for phase-shifting lateral shearing interferometer are researched. Computer simulation of these algorithms is performed and useful results are obtained.
语种	中文
内容类型	学位论文
源URL	[http://ir.siom.ac.cn/handle/181231/16408]
专题	上海光学精密机械研究所_学位论文
推荐引用方式 GB/T 7714	郭小娴. 同步移相横向剪切干涉测量技术的研究[D]. 中国科学院上海光学精密机械研究所. 2009.

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