| 题名 | 飞秒激光集成芯片实验室的微电学元件制作研究 |
| 作者 | 徐剑 |
| 学位类别 | 博士 |
| 答辩日期 | 2010 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 徐至展 ; 程亚 |
| 关键词 | 芯片实验室 飞秒激光集成技术 选择性金属化 光子学器件 表面增强拉曼散射 |
| 其他题名 | Study on the fabrication of microelectric components for femtosecond laser integration of lab-on-a-chip devices |
| 中文摘要 | 微型化和集成化是当今科学技术的一种重要发展趋势，它体现了人类力图用最少资源来解决复杂问题的愿望和需求。芯片实验室技术的出现和发展，满足了微分析系统的发展需求，并显示出改变人类未来的潜在能力。该技术将生物、化学实验室的功能集成至几平方厘米的芯片上，可以快速、高效、低成本、低能耗地分析和研究生物和化学样品。透明材料特别是玻璃以其优良的光学性质，良好的化学稳定性和生物兼容性成为构建芯片实验室的常用基底材料。目前，玻璃基芯片实验室的制作一般采用传统微电子行业的平面光刻技术以及必要的键合技术，需要昂贵的实验设备以及多步刻蚀工艺，并且很难直接制备三维功能微器件。近年来，由于飞秒激光微纳加工技术独具的三维加工能力，飞秒激光集成技术的提出和发展有望实现多功能集成的三维芯片实验室制作。然而，当前该技术主要集中于光子学功能本身以及光子学功能与微流控功能的集成，对其他功能元件的探索还很少涉及。本论文以发展用于飞秒激光集成的新型功能元器件为研究目标，主要探索微电学功能元件的制作研究。另外，也对飞秒激光加工微光学、生物检测用功能元件的制作进行了研究。论文的主要内容及创新性成果如下： 1．提出了一种面向芯片实验室应用的新型选择性金属化方法，即通过使用飞秒激光改性与化学镀铜相结合的方法来实现介质表面的选择性金属化。通过调整飞秒激光直写和化学镀铜过程中的参数可控制金属铜微结构的几何尺寸，制备出的铜结构具有良好的导电性和很强的粘附能力。与现有的方法相比，该方法更简单、快速、低成本，并与现有飞秒激光集成技术有着很好的相容性，可实现飞秒激光单片集成多功能微器件中的微电学功能。 2．研究了飞秒激光诱导介质选择性金属化的机理。结果表明，飞秒激光辐照产生的银原子是金属铜得以选择性沉积的主要原因。在此基础上，利用飞秒激光精细烧蚀的优势制备了深嵌入玻璃内部的微电极，对于开拓和发展飞秒激光微加工真三维电学器件具有重要意义。 3．提出了飞秒激光制备微电学元件的技术流程，明确了普通金属化和深度金属化的使用范围，为飞秒激光集成微电学功能的芯片设计提供了一种可行的技术方案。 4．利用狭缝整形技术辅助飞秒激光在石英玻璃中直写出了圆截面的光波导、光分束器和马赫-曾德尔干涉仪等光子学器件；并在Tb3＋掺杂硅酸盐玻璃中直写出圆截面的有源光波导，对于制备新型绿光波段波导激光器具有重要意义。 5．利用飞秒激光辐照玻璃材料表面，并通过后续的硝酸银溶液处理，制备了可在生物检测中应用的微型功能元件。表面增强拉曼散射光谱的测试结果表明，该元件对于吸附于其上样品分子的拉曼散射具有较好的增强效果，对于发展新型集成生物拉曼传感器和生物芯片系统具有积极意义。 |
| 英文摘要 | Miniaturization and integration are an important trend in current science and technology, representing the hopes and requirements of humanity by using minimal resources to solve complex problems. The emergence and development of lab-on-a-chip (LOC) technology greatly meet the needs of development of micro-analysis systems and have demonstrated potential abilities for changing the future of mankind. By incorporating the functionalities of biological and chemical laboratories in a single chip with a scale of few square centimeters, a LOC device is capable of performing a variety of chemical and biological analyses with reduction of regent consumption, waste production, analysis time and labor cost. Transparent materials, especially glass materials, owing to their excellent optical properties, chemical stabilities and biocompatibilities, have often been used as a class of substrates for LOC technology. However, the current fabrication technologies of glass-based LOC devices mainly rely on traditional planar lithography techniques borrowed from microelectronic industry and necessary bonding processes, which is difficult for directly fabricating three-dimensional (3D) functional microdevices. With the demand of a one-step integration of new functional components, developing a simple, convenient and cost-effective integration technique will be of great significance for enhancing the capabilities of multi-functional integration of LOC microdevices. In recent years, due to the unique advantages of femtosecond (fs) laser micro/nanofabrication techniques such as 3D processing capabilities, a novel technology, which is referred to as “fs laser integration”, has proven to be an efficient strategy for 3D multifunctional integration in a monolithic substrate, such as 3D photonic, optofluidic, and optical-mechanic devices. For these reasons, this new technology is particularly suitable for fabricating LOC devices. However, for a long period, the devices integrated by this technology was still restricted to have only one or two functions (e.g., 3D photonic and optofluidic integration), while the fabrication and integration of other functions has been seldom reported. For developing fs laser integration technology, this dissertation has mainly focused on the fabrication of microelectric components by fs laser microfabrication. In addition, the fabrication of photonic components and microcomponents for biological detection by fs laser microprocessing are investigated. The main contents and innovative achievements are as follow: 1．A new selective metallization method for LOC application is proposed, by use of fs laser modification combined with successive electroless copper plating for achieving selective metallization on dielectric surfaces. The geometrical parameters of the obtained copper microstructures can be controlled by adjusting the parameters of the fs laser direct writing and/or the chemical plating process. These metallic microstructures show good electrical conductivity and strong adhesion. In comparison with conventional techniques, this method is simpler, faster and more cost-effective. Moreover, this method has a good compatibility with current fs laser integration techniques. For these reasons, this method has great potential for integrating electrical functions into a variety of microdevices. 2. The mechanism of fs laser induced selective metallization on dielectric surfaces is investigated. The results show that silver atoms are produced on the surface of grooves formed by laser ablation, which serve as catalysis seeds for subsequent electroless copper plating. Furthermore, the fabrication of micro- electrodes deep embedded in glass chips by using fs laser precise ablation is demonstrated, showing great potential for development of true 3D electrical microdevices by fs laser micromachining. 3. The fabrication processes of two types of micro-electric components including ordinary metallization and deep metallization are proposed, which is beneficial for the chip-design of microelectrical devices for fs laser integration. 4. By using slit beam-shaping assisted fs laser direct writing, optical waveguides with circular cross section, optical splitter and optical Mach-Zehnder interferometers are fabricated in fused silica glass. And, active optical waveguides with circular cross-section in Tb3+-doped silicate glass are also fabricated, which is important for the fabrication of new waveguide lasers in green-band. 5. The feasibility of fabricating functional microcomponents on glass materials for biological detection with fs laser pulses is studied. The results of surface-enhanced Raman scattering spectroscopy show that, after fs laser irradiation and subsequent treatment of silver nitrate solution, the Raman signals from sample molecules can be greatly enhanced on laser-irradiated area of the glass, showing great potential for the development of novel integrated Raman bio-sensors and biochip systems. |
| 语种 | 中文 |
| 内容类型 | 学位论文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/15300]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 徐剑. 飞秒激光集成芯片实验室的微电学元件制作研究[D]. 中国科学院上海光学精密机械研究所. 2010. |
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