| 题名 | 数字式电容微位移传感器的研究与应用 |
| 作者 | 师树恒 |
| 学位类别 | 博士 |
| 答辩日期 | 2009 |
| 授予单位 | 中国科学院上海光学精密机械研究所 |
| 导师 | 朱健强 |
| 关键词 | 数字式电容微位移传感器 有限元 光栅拼接 AD7746 PIC18F单片机 屏蔽 抗干扰 |
| 其他题名 | Research and application of digital capacitance micro-displacement sensor |
| 中文摘要 | 摘 要 随着世界工业的发展，人们对位移测量和定位的精度提出越来越高的要求，各国工业研究部门和计量测试部门纷纷投入大量的资金和人力，致力于更高精度的仪器产品的研究，其中研究非接触、大量程、高精度的微位移测量系统是其主流发展方向之一。电容测微技术作为非接触式测量的主要手段，其大测量范围、纳米级分辨率、高测量精度等优点得到进一步的发展。近年来，高测量精度的仪器不断出现，广泛应用于光学工程、医学工程、微机电(MEMS)工程、现代生物工程及工业生产部门测量微小位移、微小尺寸以及测量振动、压力等场合。 本论文围绕中科院上海光学精密机械研究所的“光栅拼接技术”以及“位相调制监控及其动态补偿”等项目中对纳米级精度微位移定位系统提出的要求，研制一种高精度、高稳定性的电容式微位移检测系统。它要求电容式微位移检测系统在 的测量范围内，分辨率小于 ，线性度 ，稳定度优于 ，在温度变化 ，相对湿度50-60%的环境条件下，对微位移调整平台的定位稳定性进行实时监控。因此研究问题的焦点集中为：（1）微位移检测系统必须具有较高的稳定性；（2）微位移检测系统必须具有极高的分辨率；（3）在较大的测量范围内，微位移检测具有较高的线性度。 本论文具体的研究内容及研究成果如下： 1.回顾电容测微技术的发展历史，分析电容测微技术在国内外的研究现状。 2.在学习电容传感器测量原理的基础上，针对几种常用的平板电容式传感器测量电路，分析它们的工作原理和适用场合；分析电容传感器在高温、高湿及高频激励条件下工作的等效电路图；提出利用高性能集成芯片AD7746设计高精度数字式电容微位移传感器的思路；详细介绍数字式电容微位移传感器在“光栅拼接技术”以及“位相调制监控及其动态补偿”等项目中的应用。 3.对电容式传感器而言，由于边缘效应和杂散电容的影响，使其测量精度受到极大影响，本论文首先对电容式传感器的测量极板做了深入的理论分析，采用ANSYS有限元仿真软件对传感器测量极板的电场情况进行仿真分析，根据理论计算结果，证明加装保护环的传感器测量极板的边缘效应得到显著改善，最后完成对数字式电容微位移传感器测量极板的设计，提出在传感器测量极板设计时需要注意的一些问题。 4.详细介绍了高性能集成芯片AD7746的主要性能与特点，研究AD7746芯片的结构和原理；在充分考虑电路的屏蔽和抗干扰等问题的基础上，设计了基于AD7746的数字式电容微位移传感器的硬件电路和应用软件，并给出了部分软件设计程序；采用贴片式元件设计来实现传感器的微型化、低功耗，硬件电路设计中实现了信号采样电路与传感器极板的一体化密封，从而大大提高电容传感器的抗干扰能力； 5.在完成系统设计后，我们利用实验室现有设备，建立了实验平台，对本论文所研制的数字式电容微位移传感器进行验证。实验结果表明，该数字式电容微位移传感器的分辨率优于4nm，具有较高的稳定性，线性度优于0.4%，完全满足“光栅拼接技术”以及“位相调制监控及其动态补偿”等项目对数字式电容微位移传感器的要求。 6.对本文的工作进行总结，指出目前研究中存在的问题以及进一步的工作重点。 |
| 英文摘要 | With the rapid development of world industry, people require more and more high accuracy for displacement measuring and locating. A large number of money and manpower were paid by industrial research and measurement departments of every country to develop instruments with higher accuracy. One main trend of the development is long-range, non-contact micro-displacement measuring system with high accuracy. As a main method of non-contact measurement, capacitance micrometer has many advantages such as wide measuring range, high accuracy and resolution, etc. In recent years, instruments with high accuracy appeared constantly which was widely used by optical engineering, physical engineering, Micro Electro Mechanical Systems (MEMS) engineering, modern biology engineering and industry departments to measure micro-displacement, micro-size, vibration and pressure and so on. This thesis developed a digital micro-displacement capacitance measuring system with nanometer accuracy and high stability according to the requirement presented by the project “tiled-grating technology” and “phase modulation monitoring and dynamic compensation” which developed by Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences. The resolution of the capacitance sensor should reach to 4nm in the measuring range 10um-30um, the linearity is superior to , and the stability is superior to , when temperature changes and the relative humidity is 50-60%, the digital micro-displacement capacitance locating system can be used to monitor the position stability of the ultra precision stage for the tiled grating experiment in real time. So the study has focused on: (1) Micro-displacement measuring system with high stability (2) Micro-displacement measuring system with high resolution (3) Micro-displacement measuring system with high linearity is required in a wide measuring range. The main research contents and research results in this dissertation are as followings: 1、We reviewed the development history of the capacitance micrometer technology and analyzed the present research states of the capacitance micrometer technology home and abroad . 2、Based on researching the measuring principle of the capacitance sensor, this thesis analyzed the working principle and applicable occasions of several commonly used measuring circuit of plate capacitor, analyzed the equivalent circuit diagram of capacitance sensor which working under high temperature, high humidity, and high frequency excitation environment. This thesis put forward the thought of using the high performance integrated chip AD7746 to design digital capacitance micro-displacement sensor with high accuracy, introduced the application of digital capacitance micro-displacement sensor in project “tiled-grating technology” and “phase modulation monitoring and dynamic compensation” in detail. 3、As far as capacitance micro-displacement sensor is concerned, its measuring accuracy is highly influenced by the effect of edge effect and stray capacitance. First, this thesis made extensive analysis on the polar plate of capacitance sensor; the model of finite element methods for the electric field of polar plate of capacitance sensor is set up and simulated. Theoretical results show that due to using guard ring structure, the edge effect of measuring electrode is significantly improved. Finally, we completed the design of measuring electrode of capacitance micro-displacement sensor and proposed some questions that should be noticed in measuring electrode designing of capacitance sensor. 4、This thesis described the main performance and characteristics of the chip AD7746 in detail; Based on considering fully the shielding and anti-interference problems of sensor circuit, this thesis designed the hardware circuit and application software based on the programmable capacitance-digital converter AD7746 and partial software program is proposed. In order to fulfill the miniaturization and low power consumption of sensor, we adopted many surface bonded elements, integrated the measuring electrode and sampling circuit in a sealed container, by this way, we improved the anti-interference ability of capacitance micro-displacement sensor. 5、Having completed the design of the whole system, we made full use of the existing experimental conditions to establish an experimental evaluation platform, by using the experimental evaluation platform, we examined the performance of the digital capacitance micro-displacement sensor, the final experimental results show that the linear resolution of the digital capacitance micro-displacement sensor is higher than 4nm and the linearity is higher than 0.4% with relatively high stability, which completely meet the design requirements of the project “tiled-grating technology” and “phase modulation monitoring and dynamic compensation”. 6、Main achievements of the thesis are summarized, some problems in current research are presented, and which should be done in the further now. |
| 语种 | 中文 |
| 内容类型 | 学位论文 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/15255]  |
| 专题 | 上海光学精密机械研究所_学位论文 |
| 推荐引用方式 GB/T 7714 | 师树恒. 数字式电容微位移传感器的研究与应用[D]. 中国科学院上海光学精密机械研究所. 2009. |
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