Pitch Evaluation of High-precision Gratings

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 信息光学与光电技术实验室

	Pitch Evaluation of High-precision Gratings
	Lu, Yancong ; Zhou, Changhe ; Wei, Chunlong ; Jia, Wei ; Xiang, Xiansong ; Li, Yanyang ; Yu, Junjie ; Li, Shubin ; Wang, Jin ; Liu, Kun
	2014
会议名称	conference on holography, diffractive optics, and applications vi
通讯作者	lu, yc (reprint author), chinese acad sci, shanghai inst opt & fine mech, 390 qinghe rd, shanghai 201800, peoples r china.
英文摘要	optical encoders and laser interferometers are two primary solutions in nanometer metrology. as the precision of encoders depends on the uniformity of grating pitches, it is essential to evaluate pitches accurately. we use a ccd image sensor to acquire grating image for evaluating the pitches with high precision. digital image correlation technique is applied to filter out the noises. we propose three methods for determining the pitches of grating with peak positions of correlation coefficients. numerical simulation indicated the average of pitch deviations from the true pitch and the pitch variations are less than 0.02 pixel and 0.1 pixel for these three methods when the ideal grating image is added with salt and pepper noise, speckle noise, and gaussian noise. experimental results demonstrated that our method can measure the pitch of the grating accurately, for example, our home-made grating with 20 mu m period has 475nm peak-to-valley uniformity with 40nm standard deviation during 35mm range. another measurement illustrated that our home- made grating has 40nm peak-to-valley uniformity with 10nm standard deviation. this work verified that our lab can fabricate high-accuracy gratings which should be interesting for practical application in optical encoders.
收录类别	CPCI
会议录	holography, diffractive optics, and applications vi
会议录出版者	spie-int soc optical engineering
语种	英语
内容类型	会议论文
源URL	[http://ir.siom.ac.cn/handle/181231/17228]
专题	上海光学精密机械研究所_信息光学与光电技术实验室
作者单位	1.[Lu, Yancong 2.Zhou, Changhe 3.Wei, Chunlong 4.Jia, Wei 5.Xiang, Xiansong 6.Li, Yanyang 7.Yu, Junjie 8.Li, Shubin 9.Wang, Jin 10.Liu, Kun
推荐引用方式 GB/T 7714	Lu, Yancong,Zhou, Changhe,Wei, Chunlong,et al. Pitch Evaluation of High-precision Gratings[C]. 见:conference on holography, diffractive optics, and applications vi.