Femtosecond laser direct writing of high-Q microresonators in glass and crystals

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 强场激光物理国家重点实验室

	Femtosecond laser direct writing of high-Q microresonators in glass and crystals
	Lin, Jintian ; Xu, Yingxin ; Song, Jiangxin ; Tang, Jialei ; Fang, Zhiwei ; Wang, Min ; Fang, Wei ; Cheng, Ya
	2015
会议名称	conference on laser resonators, microresonators, and beam control xvii
通讯作者	lin, jt (reprint author), chinese acad sci, shanghai inst opt & fine mech, state key lab high field laser phys, pob 800-211, shanghai 201800, peoples r china.
英文摘要	we report on fabrication of microresonators of high quality (high-q) factors in both glass and crystalline materials by femtosecond laser 3d micromachining. based on this novel approach, we obtained high-q microresonators of non-in-plane geometries in glass materials such as fused silica and nd:glass and demonstrated lasing at a pump power as low as 69 microwatts. we also fabricated on-chip microresonators of sub-100 mu m diameters in crystalline materials including calcium fluoride and lithium niobate, and demonstrated efficient second harmonic generation using the high-q lithium niobate microresonator. furthermore, femtosecond laser 3d micromachining allows direct integration of the microresonators with other functional microcomponents, such as a microfluidic mixer and a microheater, leading to compact microdevices with enhanced functionalities. our technique opens new avenues for fabricating high-q microresonators with either 2d or 3d geometries on various types of dielectric materials.
收录类别	CPCI
会议录	laser resonators, microresonators, and beam control xvii
会议录出版者	spie-int soc optical engineering
语种	英语
内容类型	会议论文
源URL	[http://ir.siom.ac.cn/handle/181231/17202]
专题	上海光学精密机械研究所_强场激光物理国家重点实验室
作者单位	1.[Lin, Jintian 2.Song, Jiangxin 3.Tang, Jialei 4.Fang, Zhiwei 5.Wang, Min 6.Cheng, Ya] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China 7.[Xu, Yingxin 8.Fang, Wei] Zhejiang Univ, Dept Opt Engn, State Key Lab Modern Opt Instrumentat, Hangzhou 310027, Zhejiang, Peoples R China 9.[Lin, Jintian 10.Song, Jiangxin
推荐引用方式 GB/T 7714	Lin, Jintian,Xu, Yingxin,Song, Jiangxin,et al. Femtosecond laser direct writing of high-Q microresonators in glass and crystals[C]. 见:conference on laser resonators, microresonators, and beam control xvii.