Fabrication of an integrated high-quality-factor (high-Q) optofluidic sensor by femtosecond laser micromachining
Song, Jiangxin; Lin, Jintian; Tang, Jialei; Liao, Yang; He, Fei; Wang, Zhaohui; Qiao, Lingling; Sugioka, Koji; Cheng, Ya
刊名opt. express
2014
卷号22期号:12页码:14792
关键词LABEL-FREE DETECTION PHOTOSENSITIVE GLASS WAVE-GUIDES MICROCAVITIES PULSES
通讯作者cheng, y (reprint author), chinese acad sci, shanghai inst opt & fine mech, state key lab high field laser phys, pob 800-211, shanghai 201800, peoples r china.
英文摘要we report on fabrication of a microtoroid resonator of a high-quality factor (i.e., q-factor of similar to 3.24 x 10(6) measured under the critical coupling condition) integrated in a microfluidic channel using femtosecond laser three-dimensional (3d) micromachining. coupling of light into and out of the microresonator has been realized with a fiber taper that is reliably assembled with the microtoroid. the assembly of the fiber to the microtoroid is achieved by welding the fiber taper onto the sidewall of the microtoroid using co2 laser irradiation. the integrated microresonator maintains a high q-factor of 3.21 x 10(5) as measured in air, which should still be sufficient for many sensing applications. we test the functionality of the integrated optofluidic sensor by performing bulk refractive index sensing of purified water doped with tiny amount of salt. it is shown that a detection limit of similar to 1.2 x 10(-4) refractive index unit can be achieved. our result showcases the capability of integration of high-q microresonators with complex microfluidic systems using femtosecond laser 3d micromachining. (c) 2014 optical society of america
收录类别SCI
语种英语
内容类型期刊论文
版本出版稿
源URL[http://ir.siom.ac.cn/handle/181231/13623]  
专题上海光学精密机械研究所_强场激光物理国家重点实验室
作者单位1.[Song, Jiangxin
2.Lin, Jintian
3.Tang, Jialei
4.Liao, Yang
5.He, Fei
6.Wang, Zhaohui
7.Qiao, Lingling
8.Cheng, Ya] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China
9.[Song, Jiangxin
10.Lin, Jinti
推荐引用方式
GB/T 7714
Song, Jiangxin,Lin, Jintian,Tang, Jialei,et al. Fabrication of an integrated high-quality-factor (high-Q) optofluidic sensor by femtosecond laser micromachining[J]. opt. express,2014,22(12):14792.
APA Song, Jiangxin.,Lin, Jintian.,Tang, Jialei.,Liao, Yang.,He, Fei.,...&Cheng, Ya.(2014).Fabrication of an integrated high-quality-factor (high-Q) optofluidic sensor by femtosecond laser micromachining.opt. express,22(12),14792.
MLA Song, Jiangxin,et al."Fabrication of an integrated high-quality-factor (high-Q) optofluidic sensor by femtosecond laser micromachining".opt. express 22.12(2014):14792.
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