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Modeling Fizeau interferometer based on ray tracing with Zemax
He, Yiwei1,2; Hou, Xi1; Wu, Yongqian1; Wu, Fan1; Quan, Haiyang1; Liu, Fengwei1
2015
会议名称Proceedings of SPIE - The International Society for Optical Engineering
会议日期2015
卷号9677
页码96771G
通讯作者He, Yiwei
中文摘要A convenient method to study the influence of error sources in Fizeau is to build a ray-tracing model to simulate the error sources. In this paper an interferometer model is presented; an extension program is called to simulate the interference; and a preliminary research of several error sources is conducted. These examples demonstrate error analysis based on interferometer models is feasible and provide some guidance for optimizing our interferometer design. © 2015 SPIE.
英文摘要A convenient method to study the influence of error sources in Fizeau is to build a ray-tracing model to simulate the error sources. In this paper an interferometer model is presented; an extension program is called to simulate the interference; and a preliminary research of several error sources is conducted. These examples demonstrate error analysis based on interferometer models is feasible and provide some guidance for optimizing our interferometer design. © 2015 SPIE.
收录类别SCI ; EI
学科主题Error analysis - Errors - Interferometers - Laser optics - Optical testing - Surface measurement
语种英语
ISSN号0277-786X
内容类型会议论文
源URL[http://ir.ioe.ac.cn/handle/181551/7627]  
专题光电技术研究所_先光中心
作者单位1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan, China
2.University of Chinese Academy of Sciences, Beijing, China
推荐引用方式
GB/T 7714
He, Yiwei,Hou, Xi,Wu, Yongqian,et al. Modeling Fizeau interferometer based on ray tracing with Zemax[C]. 见:Proceedings of SPIE - The International Society for Optical Engineering. 2015.
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