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Neural network based intelligent control for active stressed lap optical polishing process
Yang Li; Chen Minyou; Wana Yongjian; Wang Mingyu; Zhao Junhui; Fan Bin; Xie Kaigui
2009
会议名称Proceedings of SPIE
会议日期2009
卷号7282
通讯作者Yang Li
中文摘要A neural network based intelligent controller for an optical polishing machine with 60cm diameter active stressed lap has been developed. This paper briefly introduces the shape control strategy of the stressed-lap based optical polishing system. The dynamic change of the surface shape of the stressed lap during the operating process of polishing a large aspheric optical surface is investigated. The principle and structure of neural network based shape control system are discussed. The relationship between the stressed lap driven forces and surface shape is analyzed in detail. The original data from the micro displacement sensor matrix were used to train the neural network model. Simulation results show that the proposed control model can precisely produce the combined driven forces upon given surface shape of the stressed lap and improve the deformation precision.
英文摘要A neural network based intelligent controller for an optical polishing machine with 60cm diameter active stressed lap has been developed. This paper briefly introduces the shape control strategy of the stressed-lap based optical polishing system. The dynamic change of the surface shape of the stressed lap during the operating process of polishing a large aspheric optical surface is investigated. The principle and structure of neural network based shape control system are discussed. The relationship between the stressed lap driven forces and surface shape is analyzed in detail. The original data from the micro displacement sensor matrix were used to train the neural network model. Simulation results show that the proposed control model can precisely produce the combined driven forces upon given surface shape of the stressed lap and improve the deformation precision.
收录类别EI
语种英语
内容类型会议论文
源URL[http://ir.ioe.ac.cn/handle/181551/7560]  
专题光电技术研究所_先光中心
作者单位中国科学院光电技术研究所
推荐引用方式
GB/T 7714
Yang Li,Chen Minyou,Wana Yongjian,et al. Neural network based intelligent control for active stressed lap optical polishing process[C]. 见:Proceedings of SPIE. 2009.
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