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	Optical efficiency of MEMS deformable mirror for adaptive optics
	Cai DongmEi; Yao Jun; Jiang Wenhan
	2009
会议名称	Proceedings of SPIE
会议日期	2009
卷号	7210
通讯作者	Cai DongmEi
中文摘要	MEMS deformable mirror (DM) has yet to be incorporated into a facility AO instrument especially for atmospheric compensation. Apart from these drawbacks such as limited stroke, reliability, its optical efficiency should also be concerted. The wavefront corrector in AO system should existing high optical efficiency especially atmospheric compensation under faint stars. However the MEMS DM fabricated by surface process must have etch holes in the surface of mirror. The diffraction results from etch holes decrease its optical efficiency. An MEMS deformable mirror is fabricated by commercial PolyMUMPs. There is array of etch holes to ensure that the sacrifice layer is released fully. The far field intensity distribution was simulated. The result has been analyzed and used to constructed a simple modal of the studied MEMS DM.
英文摘要	MEMS deformable mirror (DM) has yet to be incorporated into a facility AO instrument especially for atmospheric compensation. Apart from these drawbacks such as limited stroke, reliability, its optical efficiency should also be concerted. The wavefront corrector in AO system should existing high optical efficiency especially atmospheric compensation under faint stars. However the MEMS DM fabricated by surface process must have etch holes in the surface of mirror. The diffraction results from etch holes decrease its optical efficiency. An MEMS deformable mirror is fabricated by commercial PolyMUMPs. There is array of etch holes to ensure that the sacrifice layer is released fully. The far field intensity distribution was simulated. The result has been analyzed and used to constructed a simple modal of the studied MEMS DM.
收录类别	EI
语种	英语
内容类型	会议论文
源URL	[http://ir.ioe.ac.cn/handle/181551/7865]
专题	光电技术研究所_微细加工光学技术国家重点实验室（开放室）
作者单位	中国科学院光电技术研究所
推荐引用方式 GB/T 7714	Cai DongmEi,Yao Jun,Jiang Wenhan. Optical efficiency of MEMS deformable mirror for adaptive optics[C]. 见:Proceedings of SPIE. 2009.

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