Absolute interferometric shift-rotation method with pixel-level spatial frequency resolution

	Absolute interferometric shift-rotation method with pixel-level spatial frequency resolution
	Song, Weihong 1,2; Hou, Xi 1; Wu, Fan 1; Wan, Yongjian 1
刊名	Optics and Lasers in Engineering
	2014
卷号	54 页码:68-72
ISSN号	01438166
通讯作者	Song, W. (songscu@163.com)
中文摘要	Absolute interferometric testing method of shift-rotation in a Fizeau interferometer is effective in optical surface metrology with high accuracy and has been developed for decades. A pixel-level spatial frequency solution of interferometric shift-rotation method is presented in the manuscript. It requires a 90 rotational measurement and at least two translational measurements with different translations in the x and y directions besides a measurement at an original confocal position (0). With the well-organized absolute procedures, the absolute surface deviation of the test and reference surface can be obtained accurately with pixel-level spatial frequency resolution. As a result, the absolute results of the method contain much more mid-to high spatial frequency information and it is useful to directly detect the defects (dusts, pits) of the test and reference surfaces. No orthogonal polynomials fitting (such as Zernike polynomials) and interpolations are required in the calculation, and the absolute results can be guaranteed with high accuracy. Experimental absolute results of flat surfaces are given. © 2013 Elsevier Ltd.
英文摘要	Absolute interferometric testing method of shift-rotation in a Fizeau interferometer is effective in optical surface metrology with high accuracy and has been developed for decades. A pixel-level spatial frequency solution of interferometric shift-rotation method is presented in the manuscript. It requires a 90 rotational measurement and at least two translational measurements with different translations in the x and y directions besides a measurement at an original confocal position (0). With the well-organized absolute procedures, the absolute surface deviation of the test and reference surface can be obtained accurately with pixel-level spatial frequency resolution. As a result, the absolute results of the method contain much more mid-to high spatial frequency information and it is useful to directly detect the defects (dusts, pits) of the test and reference surfaces. No orthogonal polynomials fitting (such as Zernike polynomials) and interpolations are required in the calculation, and the absolute results can be guaranteed with high accuracy. Experimental absolute results of flat surfaces are given. © 2013 Elsevier Ltd.
学科主题	Laser optics - Pixels - Rotation - Surface measurement
收录类别	SCI ; EI
语种	英语
WOS记录号	WOS:000328720700011
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/7032]
专题	光电技术研究所_先光中心
作者单位	1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China 2.University of Chinese Academy of Sciences, Beijing 100039, China
推荐引用方式 GB/T 7714	Song, Weihong,Hou, Xi,Wu, Fan,et al. Absolute interferometric shift-rotation method with pixel-level spatial frequency resolution[J]. Optics and Lasers in Engineering,2014,54:68-72.
APA	Song, Weihong,Hou, Xi,Wu, Fan,&Wan, Yongjian.(2014).Absolute interferometric shift-rotation method with pixel-level spatial frequency resolution.Optics and Lasers in Engineering,54,68-72.
MLA	Song, Weihong,et al."Absolute interferometric shift-rotation method with pixel-level spatial frequency resolution".Optics and Lasers in Engineering 54(2014):68-72.