Room-temperature microstructural evolution of electroplated Cu studied by focused ion beam and positron annihilation lifetime spectroscopy

	Room-temperature microstructural evolution of electroplated Cu studied by focused ion beam and positron annihilation lifetime spectroscopy
	Yin, KB; Xia, YD; Zhang, WQ; Wang, QJ; Zhao, XN; Li, AD; Liu, ZG; Hao, XP; Wei, L; Chan, CY
刊名	JOURNAL OF APPLIED PHYSICS
	2008
卷号	103 期号:6 页码:66103
通讯作者	[Yin, K. B. ; Xia, Y. D. ; Zhang, W. Q. ; Wang, Q. J. ; Zhao, X. N. ; Li, A. D. ; Liu, Z. G.] Nanjing Univ, Natl Lab Solid State Microstruct, Nanjing 210093, Peoples R China ; [Yin, K. B. ; Xia, Y. D. ; Zhang, W. Q. ; Wang, Q. J. ; Zhao, X. N. ; Li, A. D. ; Liu, Z. G.] Nanjing Univ, Dept Mat Sci & Engn, Nanjing 210093, Peoples R China ; [Hao, X. P. ; Wei, L.] Chinese Acad Sci, Inst High Energy Phys, Beijing 100049, Peoples R China ; [Chan, C. Y. ; Cheung, K. L. ; Bayes, M. W. ; Yee, K. W.] Rohm & Haas Elect Mat Asia Ltd, Fanling, Hong Kong, Peoples R China
英文摘要	Focused ion beam (FIB) microscopy was used to obtain the time dependent transformation fraction and positron annihilation lifetime spectroscopy (PALS) was employed to analyze the vacancy-type defects in electroplated copper (Cu) during room-temperature microstructrual evolution. It was found that PALS is more sensitive than FIB to show the room-temperature microstructual evolution of electroplated Cu at the first stage of self-annealing. The majority of defects in electroplated Cu are dislocation-bound vacancies and vacancy clusters. Both the size and the concentration of the defects are similar for the two samples at the completion of electroplating. During the incubation time, the mean size of vacancy-type defects increases. After the onset of visible grain growth, the size of vacancy-type defects decreases. The detail evolutions of defects differ with the two samples. The role of the evolution of codeposited species was also discussed. (C) 2008 American Institute of Physics.
学科主题	Physics
类目[WOS]	Physics, Applied
研究领域[WOS]	Physics
原文出处	SCI
语种	英语
WOS记录号	WOS:000254536900150
内容类型	期刊论文
源URL	[http://ir.ihep.ac.cn/handle/311005/240743]
专题	高能物理研究所_多学科研究中心中国科学院高能物理研究所_中国散裂中子源
作者单位	中国科学院高能物理研究所
推荐引用方式 GB/T 7714	Yin, KB,Xia, YD,Zhang, WQ,et al. Room-temperature microstructural evolution of electroplated Cu studied by focused ion beam and positron annihilation lifetime spectroscopy[J]. JOURNAL OF APPLIED PHYSICS,2008,103(6):66103.
APA	Yin, KB.,Xia, YD.,Zhang, WQ.,Wang, QJ.,Zhao, XN.,...&魏龙.(2008).Room-temperature microstructural evolution of electroplated Cu studied by focused ion beam and positron annihilation lifetime spectroscopy.JOURNAL OF APPLIED PHYSICS,103(6),66103.
MLA	Yin, KB,et al."Room-temperature microstructural evolution of electroplated Cu studied by focused ion beam and positron annihilation lifetime spectroscopy".JOURNAL OF APPLIED PHYSICS 103.6(2008):66103.