Characteristic Study of an Atmospheric-Pressure Radio-Frequency Capacitive Argon/Nitrogen Plasma Discharge

	Characteristic Study of an Atmospheric-Pressure Radio-Frequency Capacitive Argon/Nitrogen Plasma Discharge
	Huai, Ying 1; Li, Shou-Zhe 2,3; Li, Hong 2,3; Wu, Kenan 1; Zhang, Jialiang 2,3; Wang, Shangmin 2,3; Wang, Yong-Xing 4
刊名	ieee transactions on plasma science
	2014-06-01
卷号	42 期号:6 页码:1648-1653
关键词	Atmospheric pressure optical emission spectroscopy (OES) plasma discharge radio frequency (RF)
英文摘要	a developed atmospheric-pressure capacitive discharge source driven by radio-frequency power supply at 13.56 mhz is capable of producing a homogeneous and cold glow discharge in n-2/ar. the measurements of its electrical parameters are made systematically with respect to the nitrogen component when diluted into argon plasma discharge at various concentration ratio, and the variation tendencies of the atomic nitrogen and the n-2(c-3 pi u) states with the concentration ratio of nitrogen to argon are investigated by means of optical emission spectroscopy. it is shown that although the admixture of nitrogen into argon plasma changes the electric characteristics greatly, the vibrational distribution function alters slightly at the same mixture ratio, and the production of n-atom is proportional to the nitrogen component.
WOS标题词	science & technology ; physical sciences
类目[WOS]	physics, fluids & plasmas
研究领域[WOS]	physics
关键词[WOS]	nitrogen plasma ; glow-discharges ; argon
收录类别	SCI
语种	英语
WOS记录号	WOS:000338118000016
公开日期	2016-05-09
内容类型	期刊论文
源URL	[http://cas-ir.dicp.ac.cn/handle/321008/145569]
专题	大连化学物理研究所_中国科学院大连化学物理研究所
作者单位	1.Chinese Acad Sci, Dalian Inst Chem Phys, Lab Chem Lasers, Dalian 116023, Peoples R China 2.Dalian Univ Technol, Minist Educ, Key Lab Mat Modificat Laser Ion Electron Beams, Dalian 116023, Peoples R China 3.Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116023, Peoples R China 4.Dalian Univ Technol, Coll Elect Engn, Dalian 116023, Peoples R China
推荐引用方式 GB/T 7714	Huai, Ying,Li, Shou-Zhe,Li, Hong,et al. Characteristic Study of an Atmospheric-Pressure Radio-Frequency Capacitive Argon/Nitrogen Plasma Discharge[J]. ieee transactions on plasma science,2014,42(6):1648-1653.
APA	Huai, Ying.,Li, Shou-Zhe.,Li, Hong.,Wu, Kenan.,Zhang, Jialiang.,...&Wang, Yong-Xing.(2014).Characteristic Study of an Atmospheric-Pressure Radio-Frequency Capacitive Argon/Nitrogen Plasma Discharge.ieee transactions on plasma science,42(6),1648-1653.
MLA	Huai, Ying,et al."Characteristic Study of an Atmospheric-Pressure Radio-Frequency Capacitive Argon/Nitrogen Plasma Discharge".ieee transactions on plasma science 42.6(2014):1648-1653.