Integrated multimode interference couplers in silicon-on insulator

CORC > 半导体研究所 > 中国科学院半导体研究所 > 中国科学院半导体研究所（2009年前）

	Integrated multimode interference couplers in silicon-on insulator
	Wei HZ ; Yu YZ ; Zhang XF ; Liu ZL ; Ma HZ ; Li GH ; Shi W ; Fang CS
	2000
会议名称	conference on optical interconnects for telecommunication and data communications
会议日期	nov 08-10, 2000
会议地点	beijing, peoples r china
关键词	SOI multimode interference optical waveguide device integrated optics POWER SPLITTERS
页码	124-127
通讯作者	wei hz chinese acad sci inst semicond state key lab integrated optoelect beijing 100083 peoples r china.
中文摘要	silicon-on insulator (soi) is an attractive platform for the fabrication of optoelectronic integrated circuit. thin cladding layers (< 1.0m) can be used in soi waveguide due to the large index step between si and sio2, making them compatible with the vlsi technology. here we demonstrate the fabrication of 1 x 4 and 2 x 2 multimode interference (mmi) coupler based on soi technology. performances of the devices are analyzed. the minimum excess loss of the devices is about 1.8db. the devices show uniform power distribution.
英文摘要	silicon-on insulator (soi) is an attractive platform for the fabrication of optoelectronic integrated circuit. thin cladding layers (< 1.0m) can be used in soi waveguide due to the large index step between si and sio2, making them compatible with the vlsi technology. here we demonstrate the fabrication of 1 x 4 and 2 x 2 multimode interference (mmi) coupler based on soi technology. performances of the devices are analyzed. the minimum excess loss of the devices is about 1.8db. the devices show uniform power distribution.; 于2010-10-29批量导入; made available in dspace on 2010-10-29t06:36:53z (gmt). no. of bitstreams: 1 2892.pdf: 121333 bytes, checksum: 6e4e8babd7aa49dc4fc0f9274a535651 (md5) previous issue date: 2000; china opt & optoelectr manufacturers assoc.; chinese phys soc.; spie.; chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china
收录类别	CPCI-S
会议主办者	china opt & optoelectr manufacturers assoc.; chinese phys soc.; spie.
会议录	optical interconnects for telecommunication and data communications, 4225
会议录出版者	spie-int soc optical engineering ; 1000 20th st, po box 10, bellingham, wa 98227-0010 usa
会议录出版地	1000 20th st, po box 10, bellingham, wa 98227-0010 usa
学科主题	半导体器件
语种	英语
ISSN号	0277-786x
ISBN号	0-8194-3896-0
内容类型	会议论文
源URL	[http://ir.semi.ac.cn/handle/172111/13727]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Wei HZ,Yu YZ,Zhang XF,et al. Integrated multimode interference couplers in silicon-on insulator[C]. 见:conference on optical interconnects for telecommunication and data communications. beijing, peoples r china. nov 08-10, 2000.