Stress analysis of silica-based arrayed waveguide grating by a finite element method

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	Stress analysis of silica-based arrayed waveguide grating by a finite element method
	Deng XQ ; Yang QQ ; Wang HJ ; Hu XW ; Wang QM
	2002
会议名称	photonics asia symposium 2002
会议日期	oct 14-18, 2002
会议地点	shanghai, peoples r china
关键词	finite element method stress silica optical waveguide on silicon birefringence OPTICAL WAVE-GUIDES DIFFERENCE METHOD
页码	444-447
通讯作者	deng xq chinese acad sci inst semicond r&d ctr optoelect beijing 100083 peoples r china.
中文摘要	the stress distribution in silica optical waveguides on silicon is calculated by using finite element method (fem). the waveguides are mainly subjected to compressive stress along the x direction and the z direction, and it is accumulated near the interfaces between the core and cladding layers. the shift of central wavelength of silica arrayed waveguide grating (awg) on silicon-substrate with the designed wavelength and the polarization dependence are caused by the stress in the silica waveguides.
英文摘要	the stress distribution in silica optical waveguides on silicon is calculated by using finite element method (fem). the waveguides are mainly subjected to compressive stress along the x direction and the z direction, and it is accumulated near the interfaces between the core and cladding layers. the shift of central wavelength of silica arrayed waveguide grating (awg) on silicon-substrate with the designed wavelength and the polarization dependence are caused by the stress in the silica waveguides.; 于2010-10-29批量导入; made available in dspace on 2010-10-29t06:36:44z (gmt). no. of bitstreams: 1 2862.pdf: 263000 bytes, checksum: 8e0827c2022495f28e5007c9868adb32 (md5) previous issue date: 2002; spie.; chinese opt soc.; shanghai jiaotong univ.; beijing inst technol.; australian opt soc.; opt soc korea.; opt soc japan, japan soc appl phys.; opt soc india.; optoelect ind & technol dev assoc.; optoelect ind dev assoc.; kapid.; assoc photon ind dev.; phonton ind & dev assoc.; chinese soc astronaut.; spie asia-pacific chapter.; chinese acad sci, inst semicond, r&d ctr optoelect, beijing 100083, peoples r china
收录类别	CPCI-S
会议主办者	spie.; chinese opt soc.; shanghai jiaotong univ.; beijing inst technol.; australian opt soc.; opt soc korea.; opt soc japan, japan soc appl phys.; opt soc india.; optoelect ind & technol dev assoc.; optoelect ind dev assoc.; kapid.; assoc photon ind dev.; phonton ind & dev assoc.; chinese soc astronaut.; spie asia-pacific chapter.
会议录	materials, devices, and systems for display and lighting, 4918
会议录出版者	spie-int soc optical engineering ; 1000 20th st, po box 10, bellingham, wa 98227-0010 usa
会议录出版地	1000 20th st, po box 10, bellingham, wa 98227-0010 usa
学科主题	光电子学
语种	英语
ISSN号	0277-786x
ISBN号	0-8194-4707-2
内容类型	会议论文
源URL	[http://ir.semi.ac.cn/handle/172111/13701]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Deng XQ,Yang QQ,Wang HJ,et al. Stress analysis of silica-based arrayed waveguide grating by a finite element method[C]. 见:photonics asia symposium 2002. shanghai, peoples r china. oct 14-18, 2002.