Dynamic properties of a metal photo-thermal micro-actuator

	Dynamic properties of a metal photo-thermal micro-actuator
	Shi, B; Zhang, HJ; Wang B(王波); Yi FT(伊福廷); Wang, B; Yi, FT; Jiang, JZ; Zhang, DX
刊名	APPLIED OPTICS
	2015
卷号	54 期号:6 页码:1369-1373
英文摘要	This work presents the design, modeling, simulation, and characterization of a metal bent-beam photo-thermal micro-actuator. The mechanism of actuation is based on the thermal expansion of the microactuator which is irradiated by a laser, achieving noncontact control of the power supply. Models for micro-actuators were established and finite-element simulations were carried out to investigate the effects of various parameters on actuation properties. It is found that the thermal expansion coefficient, thermal conductivity, and the geometry size largely affected actuation behavior whereas heat capacity, density, and Young's modulus did not. Experiments demonstrated the dynamic properties of a Ni micro-actuator fabricated via LIGA technology with 1100/30/100 mu m (long/wide/thick) arms. The tip displacement of the micro-actuator could achieve up to 42 mu m driven by a laser beam (1064 nm wavelength, 1.2 W power, and a driving frequency of 1 HZ). It is found that the tip displacement decreases with increasing laser driving frequency. For 8 Hz driving frequency, 17 mu m(peak-valley value) can be still reached, which is large enough for the application as micro-electro-mechanical systems. Metal photo-thermal micro actuators have advantages such as large displacement, simple structure, and large temperature tolerance, and therefore they will be promising in the fields of micro/nanotechnology. (C) 2015 Optical Society of America
学科主题	Optics
类目[WOS]	Optics
收录类别	SCI ; EI
WOS记录号	WOS:000349685700020
公开日期	2016-05-03
内容类型	期刊论文
源URL	[http://ir.ihep.ac.cn/handle/311005/228087]
专题	高能物理研究所_多学科研究中心
推荐引用方式 GB/T 7714	Shi, B,Zhang, HJ,Wang B,et al. Dynamic properties of a metal photo-thermal micro-actuator[J]. APPLIED OPTICS,2015,54(6):1369-1373.
APA	Shi, B.,Zhang, HJ.,王波.,伊福廷.,Wang, B.,...&Zhang, DX.(2015).Dynamic properties of a metal photo-thermal micro-actuator.APPLIED OPTICS,54(6),1369-1373.
MLA	Shi, B,et al."Dynamic properties of a metal photo-thermal micro-actuator".APPLIED OPTICS 54.6(2015):1369-1373.