Grazing exit X-ray fluorescence spectroscopy

	Grazing exit X-ray fluorescence spectroscopy
	Xu Q(徐清); Wei XJ(魏向军); Huang YY(黄宇营); He W(何伟); Xu, Q; Wei, XJ; Huang, YY; He, W
刊名	HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION
	2005
卷号	29 页码:#REF!
关键词	grazing exit X-ray fluorescence spectroscopy instrument development thin film
其他题名	掠出射X射线荧光分析方法
通讯作者	Xu, Q (reprint author), Chinese Acad Sci, Inst High Energy Phys, Beijing 100049, Peoples R China.
英文摘要	In this paper, A grazing exit X-ray fluorescence spectroscopy for thin film analysis was developed by Institute of High Energy Physics, Chinese Academy of Sciences. GEXRF is a new method of instrumental analysis that not only allows determination of the film composition, but also provides information on depth distributions and densities, thickness of films. With grazing-emission X-ray fluorescence, the opposite principle of total reflection X-ray fluorescence is utilized. In this study, X-ray fluorescence (XRF) experiments have been performed for metal thin films (Ni, Ni/Ti) on silicon substrates and a mirror-polished GaAs under the grazing exit condition. The XRF intensity was measured as a function of the exit angle for nearly normal X-ray incidence. The angular dependence of the grazing exit XRF intensity showed a sharp increase at the critical angle of K-alpha, K-beta radiation for the metal film. The applicability of the grazing exit XRF for thin-film analysis was clearly demonstrated.
学科主题	Physics
类目[WOS]	Physics, Nuclear ; Physics, Particles & Fields
收录类别	SCI
WOS记录号	WOS:000234206900021
公开日期	2016-05-03
内容类型	期刊论文
源URL	[http://ir.ihep.ac.cn/handle/311005/226006]
专题	高能物理研究所_多学科研究中心
推荐引用方式 GB/T 7714	Xu Q,Wei XJ,Huang YY,et al. Grazing exit X-ray fluorescence spectroscopy[J]. HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION,2005,29:#REF!.
APA	徐清.,魏向军.,黄宇营.,何伟.,Xu, Q.,...&He, W.(2005).Grazing exit X-ray fluorescence spectroscopy.HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION,29,#REF!.
MLA	徐清,et al."Grazing exit X-ray fluorescence spectroscopy".HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION 29(2005):#REF!.