A study on inorganic phase-change resist Ge2Sb2(1-x)Bi2xTe5 and its mechanism

	A study on inorganic phase-change resist Ge2Sb2(1-x)Bi2xTe5 and its mechanism
	Li, JZ; 郑黎荣;Zheng, LR; Xi, HZ; Liu, DX; Zhang, HG; Tian, Y; Xie, Y; Zhu, X; Liu, Q
刊名	PHYSICAL CHEMISTRY CHEMICAL PHYSICS
	2014
卷号	16 期号:40 页码:22281-22286
英文摘要	The inorganic phase-change photoresist Ge2Sb1.5Bi0.5Te5 has a tot of advantages such as the two-sides of the photoresist, a large difference in the etching rate between it and Si, and so on, making it a promising candidate for use in the full-vacuum manufacture of the next generation ultra-large scale integrated circuits (ULSI). However, the physical origin of its excellent properties is. still unclear, hindering its improvement and the optimization of its performance. In this work, we extended the Ge2Sb1.5Bi0.5Te5 to Ge2Sb2(1-x)Bi2xTe5 (GSBT, x = 0.1, 0.25, 0.35) and further investigated their properties. Using X-ray diffraction and X-ray absorption fine structure (XAFS) analyses, we built the structures of crystalline and amorphous GSBT, and attributed the excellent physical and chemical properties of crystalline GBST to the different atomic structures compared to amorphous GBST. Moreover, we clarified that the performance of GSBT was enhanced by the increase of Bi, accompanied by a decrease of the phase-change temperature, and gave a criterion for improving GSBT.
学科主题	Chemistry; Physics
收录类别	SCI
WOS记录号	WOS:000343072800040
公开日期	2016-05-03
内容类型	期刊论文
源URL	[http://ir.ihep.ac.cn/handle/311005/225253]
专题	中国科学院高能物理研究所
推荐引用方式 GB/T 7714	Li, JZ,郑黎荣；Zheng, LR,Xi, HZ,et al. A study on inorganic phase-change resist Ge2Sb2(1-x)Bi2xTe5 and its mechanism[J]. PHYSICAL CHEMISTRY CHEMICAL PHYSICS,2014,16(40):22281-22286.
APA	Li, JZ.,郑黎荣；Zheng, LR.,Xi, HZ.,Liu, DX.,Zhang, HG.,...&Liu, Q.(2014).A study on inorganic phase-change resist Ge2Sb2(1-x)Bi2xTe5 and its mechanism.PHYSICAL CHEMISTRY CHEMICAL PHYSICS,16(40),22281-22286.
MLA	Li, JZ,et al."A study on inorganic phase-change resist Ge2Sb2(1-x)Bi2xTe5 and its mechanism".PHYSICAL CHEMISTRY CHEMICAL PHYSICS 16.40(2014):22281-22286.