360-nm Photoluminescence from Silicon Oxide Films Embedded with Silicon Nanocrystals

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	360-nm Photoluminescence from Silicon Oxide Films Embedded with Silicon Nanocrystals
	Yang Linlin ; Guo Hengqun ; Zeng Youhua ; Wang Qiming
刊名	semiconductor photonics and technology
	2006
卷号	12 期号:2 页码:90-94
中文摘要	si-rich silicon oxide films were deposited by rf magnetron sputtering onto composite si/sio2 targets. after annealed at different temperature, the silicon oxide films embedded with silicon nanocrystals were obtained. the photoluminescenee（pl） from the silicon oxide films embedded with silicon nanocrystals was observed at room temperature. the strong peak is at 360 nm, its position is independent of the annealing temperature. the origin of the 360-nm pl in the silicon oxide films embedded with silicon nanoerystals was discussed.
英文摘要	si-rich silicon oxide films were deposited by rf magnetron sputtering onto composite si/sio2 targets. after annealed at different temperature, the silicon oxide films embedded with silicon nanocrystals were obtained. the photoluminescenee（pl） from the silicon oxide films embedded with silicon nanocrystals was observed at room temperature. the strong peak is at 360 nm, its position is independent of the annealing temperature. the origin of the 360-nm pl in the silicon oxide films embedded with silicon nanoerystals was discussed.; 于2010-11-23批量导入; zhangdi于2010-11-23 13:02:24导入数据到semi-ir的ir; made available in dspace on 2010-11-23t05:02:24z (gmt). no. of bitstreams: 1 4143.pdf: 337848 bytes, checksum: f70934e0bb9c557af6156aea4467ca62 (md5) previous issue date: 2006; national natural science foundation of china; college of information science and engineering, huaqiao university;institute of semiconductors, cass
学科主题	光电子学
收录类别	CSCD
资助信息	national natural science foundation of china
语种	英语
公开日期	2010-11-23 ; 2011-04-28
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/16445]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Yang Linlin,Guo Hengqun,Zeng Youhua,et al. 360-nm Photoluminescence from Silicon Oxide Films Embedded with Silicon Nanocrystals[J]. semiconductor photonics and technology,2006,12(2):90-94.
APA	Yang Linlin,Guo Hengqun,Zeng Youhua,&Wang Qiming.(2006).360-nm Photoluminescence from Silicon Oxide Films Embedded with Silicon Nanocrystals.semiconductor photonics and technology,12(2),90-94.
MLA	Yang Linlin,et al."360-nm Photoluminescence from Silicon Oxide Films Embedded with Silicon Nanocrystals".semiconductor photonics and technology 12.2(2006):90-94.