Determination of AlxGa1-xAs Auger sensitivity factors

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	Determination of AlxGa1-xAs Auger sensitivity factors
	Chen WD ; Cui YD
刊名	applied surface science
	1996
卷号	100 期号:0 页码:156-159
关键词	ELECTRON SPECTROSCOPY
ISSN号	0169-4332
通讯作者	chen wd chinese acad sci inst semicond beijing 100083 peoples r china.
中文摘要	alxga1-xas auger sensitivity factors have been determined by using phi610 scanning auger microprobe with pure elemental standards al, ag and matrix gaas. the quantitative results of alxga1-xas measured by the present method are in very good agreement with x-ray double crystal measurements. it is shown that by using sensitivity factors obtained from the self-instrument, the accuracy of the quantitative aes analysis can be considerably improved compared with that using elemental relative sensitivity factors given by the phi handbook or internal standard method.
学科主题	半导体材料
收录类别	SCI
语种	英语
公开日期	2010-11-17
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/15381]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Chen WD,Cui YD. Determination of AlxGa1-xAs Auger sensitivity factors[J]. applied surface science,1996,100(0):156-159.
APA	Chen WD,&Cui YD.(1996).Determination of AlxGa1-xAs Auger sensitivity factors.applied surface science,100(0),156-159.
MLA	Chen WD,et al."Determination of AlxGa1-xAs Auger sensitivity factors".applied surface science 100.0(1996):156-159.