Efficient Shape Reconstruction of Microlens Using Optical Microscopy

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	Efficient Shape Reconstruction of Microlens Using Optical Microscopy
	Wei YJ(魏阳杰); Wu CD(吴成东); Wang Y(王义); Dong ZL(董再励)
刊名	IEEE Transactions on Industrial Electronics
	2015
卷号	62 期号:12 页码:7655-7664
关键词	Microlens optical diffusion polydimethylsiloxane (PDMS) relative blurring shape from defocus(SFD).
ISSN号	0278-0046
通讯作者	魏阳杰
产权排序	4
中文摘要	The imaging properties of a microlens are highly related to its 3-D profile; therefore, it is of fundamental importance to measure its 3-D geometrical characteristics with high accuracy after industrial fabrication. However, common 3-D measurement tools are difficult to use for fast, noninvasive, and precise 3-D measurement of a microlens. Depth acquisition is a direct way to understand the 3-D properties of objects in computer vision, and shape from defocus (SFD) has been demonstrated to be effective for 3-D reconstruction. In this paper, a depth reconstruction method from blurring using optical microscopy and optical diffraction is proposed to reconstruct the global shape of a microlens. First, the relationship between the intensity distribution and the depth information is introduced. Second, a blurring imaging model with optical diffraction is formulated through curve fitting, accounting for relative blurring and heat diffusion, and a new SFD method with optical diffraction and defocused images is proposed. Finally, a polydimethylsiloxane (PDMS) microlens is used to validate the proposed SFD method, and the results show that its global shape can be reconstructed with high precision. The average estimation error is 77 nm, and the cost time is reduced by 92.5% compared with atomic force microscopy scanning.
WOS标题词	Science & Technology ; Technology
类目[WOS]	Automation & Control Systems ; Engineering, Electrical & Electronic ; Instruments & Instrumentation
研究领域[WOS]	Automation & Control Systems ; Engineering ; Instruments & Instrumentation
关键词[WOS]	INTERFEROMETER ; IMAGES ; DEPTH ; LENS
收录类别	SCI ; EI
语种	英语
WOS记录号	WOS:000365019500034
内容类型	期刊论文
源URL	[http://ir.sia.cn/handle/173321/17313]
专题	沈阳自动化研究所_机器人学研究室
推荐引用方式 GB/T 7714	Wei YJ,Wu CD,Wang Y,et al. Efficient Shape Reconstruction of Microlens Using Optical Microscopy[J]. IEEE Transactions on Industrial Electronics,2015,62(12):7655-7664.
APA	Wei YJ,Wu CD,Wang Y,&Dong ZL.(2015).Efficient Shape Reconstruction of Microlens Using Optical Microscopy.IEEE Transactions on Industrial Electronics,62(12),7655-7664.
MLA	Wei YJ,et al."Efficient Shape Reconstruction of Microlens Using Optical Microscopy".IEEE Transactions on Industrial Electronics 62.12(2015):7655-7664.