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题名	子孔径拼接干涉检测光学镜面算法的研究
作者	闫力松
学位类别	博士
答辩日期	2015-05
授予单位	中国科学院大学
导师	张学军,王孝坤
关键词	干涉检测 子孔径拼接 光学镜面 最大似然估计 正交化Zernike多项式拟合
其他题名	Research on the algorithm testing optical mirror by subaperture stitching interferometry
学位专业	光学工程
中文摘要	随着空间光学技术的不断发展，光学系统的口径越来越大，随之要求光学元件的口径亦越来越大，传统的光学检测手段在检测大口径光学平面，大口径凸球面及凸非球面等光学元件时，通常需要比检测元件口径更大的光学参考镜或光学辅助元件，例如补偿器，CGH（计算全息图）等。然而这些大口径光学参考镜及辅助元件不仅加工难度高，而且加工周期长，生产成本大，同时其会引入一定的加工误差与装调误差。 子孔径拼接作为一种有效的光学检测手段，拓宽了干涉仪检测的动态范围，同时无需其它辅助元件即可实现对大口径平面、球面、非球面的面形测量，在提高了检测分辨率的同时，亦降低了成本，缩短了工期。本文主要对子孔径拼接检测算法进行了理论研究，同时结合工程实例对算法精度进行了实验验证，论文的研究内容包括以下四个部分： 1， 结合最大似然估计与正交化Zernike多项式拟合理论，针对大口径光学平面镜检测中参考镜面形误差不能被忽略的问题，建立了非理想标准镜检测光学平面的算法模型，该算法可以在检测中同时计算出被检测镜与参考镜的面形，并结合TMT项目（thirty-meter telescope program）对该算法进行了仿真分析，验证了算法检测精度与可靠性。 2， 分析了圆形子孔径拼接检测光学球面中子孔径规划，投影畸变校正等问题，同时提出了一套合理的数学模型，在给定球面口径与曲率半径的前提下，可以自动实现对检测子孔径的规划，畸变校正与拼接测量，同时结合工程实例对该模型的有效性进行了实验验证。 3， 对圆形子孔径非零位拼接检测非球面镜进行了理论研究，包括子孔径检测最接近球面半径求解；子孔径规划；子孔径检测非共路误差求解；子孔径检测投影畸变校正等问题。同时结合三角剖分理论与最小二乘拟合理论提出了一套算法模型，并结合工程实例，对该算法模型的检测精度进行了实验验证。 4， 将子孔径拼接与补偿器或CGH补偿等补偿技术相结合，针对混合补偿检测建立了一套混合补偿拼接检测模型，并结合工程实例对该模型的有效性进行了实验研究。同时提出了一套加工与检测坐标对准模型，基于该模型可以实现对光学元件加工与检测交替迭代的过程，并基于工程实例对该模型的有效性进行了实验验证。
英文摘要	With the development of space optical technology, the aperture of the optical system is growing, causing the aperture of the optical mirrors becoming larger and larger. It usually needs auxiliary optical components such as compensator, CGH for traditional methods when testing large flat mirror, large convex sphere and asphere mirrors. It is not only difficult to process these large reference mirror and auxiliary optical components, but also time-consuming and expensive. At the same time, it will introduce some processing and alignment errors. As an effective optical testing method, subaperture stitching not only broadens the dynamic range of the interferometer but also accomplish the testing to large plane, sphere and asphere mirrors without additional components. It improves the testing resolution, reduces the cost and shortens the timescale. In this paper, we mainly studied the stitching algorithm and verified the accuracy of the algorithm based on project examples. The contents of the paper include the following four parts: 1, Combined with maximum likelihood estimation and orthogonal fitting of Zernike polynomial theory, we established an algorithm model testing optical plane mirror considering that the error of the reference mirror can not be ignored. With the algorithm, both the shapes of the reference mirror and the test mirror can be calculated. Simulation is performed combined with TMT(thirty-meter telescope program) program to verify the accuracy and reliability of the algorithm. 2, Subaperture arrangement and correction of projection distortion were studied when testing sphere mirrors with circular subapertures. At the meantime, a reasonable mathematical model was proposed. Subaperture arrangement, correction of projection distortion and stitching could be accomplished when we know the aperture and radius of curvature of the sphere mirror. The effectiveness of the model was also verified with engineering examples. 3, We studied the theory of non-null stitching testing to asphere mirrors with circular subapertures, including the radius calculation of the best-fit sphere; subapertures arrangement; non null errors calculation; correction of projection distortion. Combined the triangulation theory and the least-squares fitting theory, an reasonable algorithm model was established and the testing accuracy of the model was calculated with engineering examples. 4, we combined the stitching with other compensation technology such as compensator, CGH and established a mixed compensation testing model. The effectiveness of the model was studied with engineering examples. At the same time, we proposed a model accomplishing the alignment between processing coordinate and testing coordinate. Optical processing and testing could be carried on based on this model and the validity of the model was verified with engineering examples.
公开日期	2015-12-24
内容类型	学位论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/48934]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出
推荐引用方式 GB/T 7714	闫力松. 子孔径拼接干涉检测光学镜面算法的研究[D]. 中国科学院大学. 2015.

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