Growth of CZTS thin films by sulfurization of sputtered single-layered Cu-Zn-Sn metallic precursors from an alloy target

CORC > 兰州化学物理研究所 > 中国科学院兰州化学物理研究所 > 先进润滑与防护材料研究发展中心

	Growth of CZTS thin films by sulfurization of sputtered single-layered Cu-Zn-Sn metallic precursors from an alloy target
	Zhou, Shanshan 1; Tan, Ruiqin 1; Jiang X(姜欣)2 ; Shen, Xiang 1; Xu, Wei 3; Song, Weijie 3
刊名	Journal of Materials Science: Materials in Electronics
	2013
卷号	24 期号:12 页码:4958-4963
ISSN号	0957-4522
通讯作者	Tan, Ruiqin
英文摘要	Cu₂ZnSnS₄ (CZTS) thin films were prepared by sulfurizing single-layered metallic Cu-Zn-Sn precursors which were deposited by DC magnetron sputtering using a Cu-Zn-Sn ternary alloy target. The composition, microstructure and properties of the CZTS thin films prepared under different sputtering pressure and DC power were investigated. The results showed that the sputtering rate of Cu atom increases as the sputtering pressure and DC power increased. The microstructure of CZTS thin films can be optimized by sputtering pressure and DC power. The CZTS thin film prepared under 1 Pa and 30 W showed a pure Kesterite phase and a dense micro-structure. The direct optical band gap of this CZTS thin film was calculated as 1.49 eV with a high optical absorption coefficient over 10⁴ cm^-1. The Hall measurement showed the film is a p-type semiconductor with a resistivity of 1.06 Ω cm, a carrier concentration of 7.904 x 10¹⁷ cm^-3 and a mobility of 7.47 cm² Vs^-1.
学科主题	材料科学与物理化学
收录类别	SCI
资助信息	the Natural Science Foundation of China (No. 21377063);the Ningbo Natural Science Foundation (No. 2012A610120);K.C. Wong Magna Fund in Ningbo University and “Information and Communication Engineering” Priority Discipline Open Fund of Zhejiang Province
语种	英语
WOS记录号	WOS:000327127900045
内容类型	期刊论文
源URL	[http://210.77.64.217/handle/362003/18259]
专题	兰州化学物理研究所_先进润滑与防护材料研究发展中心
作者单位	1.Ningbo Univ, Coll Informat Sci & Engn, Ningbo 315211, Zhejiang, Peoples R China 2.Chinese Acad Sci, Lanzhou Inst Chem Phys, Lanzhou 730000, Peoples R China 3.Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Ningbo 315201, Zhejiang, Peoples R China
推荐引用方式 GB/T 7714	Zhou, Shanshan,Tan, Ruiqin,Jiang X,et al. Growth of CZTS thin films by sulfurization of sputtered single-layered Cu-Zn-Sn metallic precursors from an alloy target[J]. Journal of Materials Science: Materials in Electronics,2013,24(12):4958-4963.
APA	Zhou, Shanshan,Tan, Ruiqin,Jiang X,Shen, Xiang,Xu, Wei,&Song, Weijie.(2013).Growth of CZTS thin films by sulfurization of sputtered single-layered Cu-Zn-Sn metallic precursors from an alloy target.Journal of Materials Science: Materials in Electronics,24(12),4958-4963.
MLA	Zhou, Shanshan,et al."Growth of CZTS thin films by sulfurization of sputtered single-layered Cu-Zn-Sn metallic precursors from an alloy target".Journal of Materials Science: Materials in Electronics 24.12(2013):4958-4963.